Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor

Z. Wang; K. Shi; H. Chen; F. Feng; J. C. Sun; Z. Han

doi:10.1016/j.tsf.2008.10.071

Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor

Z. Wang^*, K. Shi, H. Chen, F. Feng, J. C. Sun, Z. Han

^*此作品的通讯作者

物理学院

Tsinghua University

科研成果: 期刊稿件 › 文章 › 同行评审

6 引用（Scopus）

摘要

High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy E_i. The roles of assisting ion beam and the influences of ion energy E_i on the structure of the films were studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of E_i. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment.

源语言	英语
页（从-至）	2044-2047
页数	4
期刊	Thin Solid Films
卷	517
期	6
DOI	https://doi.org/10.1016/j.tsf.2008.10.071
出版状态	已出版 - 30 1月 2009

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title = "Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor",

abstract = "High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy Ei. The roles of assisting ion beam and the influences of ion energy Ei on the structure of the films were studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of Ei. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment.",

keywords = "Biaxial texture, Buffer layer, Coated conductor, Ion beam assisted deposition, Surface morphology, X-ray diffraction, Yttria stabilized zirconia",

author = "Z. Wang and K. Shi and H. Chen and F. Feng and Sun, {J. C.} and Z. Han",

year = "2009",

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doi = "10.1016/j.tsf.2008.10.071",

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TY - JOUR

T1 - Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor

AU - Wang, Z.

AU - Shi, K.

AU - Chen, H.

AU - Feng, F.

AU - Sun, J. C.

AU - Han, Z.

PY - 2009/1/30

Y1 - 2009/1/30

N2 - High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy Ei. The roles of assisting ion beam and the influences of ion energy Ei on the structure of the films were studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of Ei. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment.

AB - High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy Ei. The roles of assisting ion beam and the influences of ion energy Ei on the structure of the films were studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of Ei. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment.

KW - Biaxial texture

KW - Buffer layer

KW - Coated conductor

KW - Ion beam assisted deposition

KW - Surface morphology

KW - X-ray diffraction

KW - Yttria stabilized zirconia

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U2 - 10.1016/j.tsf.2008.10.071

DO - 10.1016/j.tsf.2008.10.071

M3 - Article

AN - SCOPUS:58149195111

SN - 0040-6090

VL - 517

SP - 2044

EP - 2047

JO - Thin Solid Films

JF - Thin Solid Films

IS - 6

ER -

Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor

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