Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor

Z. Wang; K. Shi; H. Chen; F. Feng; J. C. Sun; Z. Han

doi:10.1016/j.tsf.2008.10.071

Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor

Z. Wang^*, K. Shi, H. Chen, F. Feng, J. C. Sun, Z. Han

^*Corresponding author for this work

School of Physics

Tsinghua University

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy E_i. The roles of assisting ion beam and the influences of ion energy E_i on the structure of the films were studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of E_i. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment.

Original language	English
Pages (from-to)	2044-2047
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	6
DOIs	https://doi.org/10.1016/j.tsf.2008.10.071
Publication status	Published - 30 Jan 2009

Keywords

Biaxial texture
Buffer layer
Coated conductor
Ion beam assisted deposition
Surface morphology
X-ray diffraction
Yttria stabilized zirconia

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10.1016/j.tsf.2008.10.071

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title = "Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor",

abstract = "High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy Ei. The roles of assisting ion beam and the influences of ion energy Ei on the structure of the films were studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of Ei. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment.",

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T1 - Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor

AU - Wang, Z.

AU - Shi, K.

AU - Chen, H.

AU - Feng, F.

AU - Sun, J. C.

AU - Han, Z.

PY - 2009/1/30

Y1 - 2009/1/30

N2 - High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy Ei. The roles of assisting ion beam and the influences of ion energy Ei on the structure of the films were studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of Ei. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment.

AB - High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy Ei. The roles of assisting ion beam and the influences of ion energy Ei on the structure of the films were studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of Ei. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment.

KW - Biaxial texture

KW - Buffer layer

KW - Coated conductor

KW - Ion beam assisted deposition

KW - Surface morphology

KW - X-ray diffraction

KW - Yttria stabilized zirconia

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DO - 10.1016/j.tsf.2008.10.071

M3 - Article

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SN - 0040-6090

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SP - 2044

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JO - Thin Solid Films

JF - Thin Solid Films

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ER -

Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor

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