Design and fabrication of a novel MEMS vibrating ring gyroscope

Zhiwei Kou, Jun Liu, Huiliang Cao, Hengzhen Feng, Jianjun Ren, Qiang Kang, Yunbo Shi

科研成果: 书/报告/会议事项章节会议稿件同行评审

8 引用 (Scopus)

摘要

A novel vibrating ring gyroscope is proposed in this paper, and the structure employs axisymmetric ring resonator and capacitance transducers. Motion characteristics of the ring resonator and the setting of the capacitance electrodes are discussed in detail. The simulation results demonstrate that the natural resonant frequency of the operating mode of the gyroscope is 8.805 kHz and 8.807 kHz, and the frequency splitting is 2 Hz. The dynamic characteristics of the operating mode of the ring resonator are analyzed. The angular sensitivity model of the gyroscope is established. Finally, the vibrating ring gyroscope with capacitor electrodes is fabricated and its superiority is preliminaries confirmed.

源语言英语
主期刊名Proceedings of 2017 IEEE 3rd Information Technology and Mechatronics Engineering Conference, ITOEC 2017
编辑Bing Xu
出版商Institute of Electrical and Electronics Engineers Inc.
131-134
页数4
ISBN(电子版)9781509053629
DOI
出版状态已出版 - 27 11月 2017
已对外发布
活动3rd IEEE Information Technology and Mechatronics Engineering Conference, ITOEC 2017 - Chongqing, 中国
期限: 3 10月 20175 10月 2017

出版系列

姓名Proceedings of 2017 IEEE 3rd Information Technology and Mechatronics Engineering Conference, ITOEC 2017
2017-January

会议

会议3rd IEEE Information Technology and Mechatronics Engineering Conference, ITOEC 2017
国家/地区中国
Chongqing
时期3/10/175/10/17

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