@inproceedings{304f2141265640e2a77aadd31d00c2b6,
title = "Design and fabrication of a novel MEMS vibrating ring gyroscope",
abstract = "A novel vibrating ring gyroscope is proposed in this paper, and the structure employs axisymmetric ring resonator and capacitance transducers. Motion characteristics of the ring resonator and the setting of the capacitance electrodes are discussed in detail. The simulation results demonstrate that the natural resonant frequency of the operating mode of the gyroscope is 8.805 kHz and 8.807 kHz, and the frequency splitting is 2 Hz. The dynamic characteristics of the operating mode of the ring resonator are analyzed. The angular sensitivity model of the gyroscope is established. Finally, the vibrating ring gyroscope with capacitor electrodes is fabricated and its superiority is preliminaries confirmed.",
keywords = "MEMS, Operating mode, Ring resonator, Vibrating ring gyroscope",
author = "Zhiwei Kou and Jun Liu and Huiliang Cao and Hengzhen Feng and Jianjun Ren and Qiang Kang and Yunbo Shi",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 3rd IEEE Information Technology and Mechatronics Engineering Conference, ITOEC 2017 ; Conference date: 03-10-2017 Through 05-10-2017",
year = "2017",
month = nov,
day = "27",
doi = "10.1109/ITOEC.2017.8122396",
language = "English",
series = "Proceedings of 2017 IEEE 3rd Information Technology and Mechatronics Engineering Conference, ITOEC 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "131--134",
editor = "Bing Xu",
booktitle = "Proceedings of 2017 IEEE 3rd Information Technology and Mechatronics Engineering Conference, ITOEC 2017",
address = "United States",
}