Deposition of diamond-like carbon on inner surface by hollow cathode discharge

Shichao Li; Feng He; Qi Guo; Jiting Ouyang

doi:10.1088/1009-0630/16/1/14

Deposition of diamond-like carbon on inner surface by hollow cathode discharge

Shichao Li, Feng He, Qi Guo, Jiting Ouyang^*

^*此作品的通讯作者

物理学院

Beijing Institute of Technology

科研成果: 期刊稿件 › 文章 › 同行评审

12 引用（Scopus）

摘要

A cylindrical hollow cathode discharge (HCD) in CH₄/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon (DLC) films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma images and the optical emission spectrum (OES) were measured in Ar and CH₄/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy (SEM). The results show that the electron excitation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp ³/sp² bonds decreases with the applied voltage and the deposition time. The optimizing CH₄ content was found to be around CH₄/Ar = 1/5 for good quality of DLC films in the present system.

源语言	英语
页（从-至）	63-67
页数	5
期刊	Plasma Science and Technology
卷	16
期	1
DOI	https://doi.org/10.1088/1009-0630/16/1/14
出版状态	已出版 - 1月 2014

访问文件

10.1088/1009-0630/16/1/14

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{f3d755bb384946bc82faabf0786ae9d3,

title = "Deposition of diamond-like carbon on inner surface by hollow cathode discharge",

abstract = "A cylindrical hollow cathode discharge (HCD) in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon (DLC) films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma images and the optical emission spectrum (OES) were measured in Ar and CH4/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy (SEM). The results show that the electron excitation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp 3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar = 1/5 for good quality of DLC films in the present system.",

keywords = "diamond-like carbon, film deposition, hollow cathode discharge, inner surface",

author = "Shichao Li and Feng He and Qi Guo and Jiting Ouyang",

year = "2014",

month = jan,

doi = "10.1088/1009-0630/16/1/14",

language = "English",

volume = "16",

pages = "63--67",

journal = "Plasma Science and Technology",

issn = "1009-0630",

publisher = "IOP Publishing Ltd.",

number = "1",

}

TY - JOUR

T1 - Deposition of diamond-like carbon on inner surface by hollow cathode discharge

AU - Li, Shichao

AU - He, Feng

AU - Guo, Qi

AU - Ouyang, Jiting

PY - 2014/1

Y1 - 2014/1

N2 - A cylindrical hollow cathode discharge (HCD) in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon (DLC) films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma images and the optical emission spectrum (OES) were measured in Ar and CH4/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy (SEM). The results show that the electron excitation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp 3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar = 1/5 for good quality of DLC films in the present system.

AB - A cylindrical hollow cathode discharge (HCD) in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon (DLC) films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma images and the optical emission spectrum (OES) were measured in Ar and CH4/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy (SEM). The results show that the electron excitation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp 3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar = 1/5 for good quality of DLC films in the present system.

KW - diamond-like carbon

KW - film deposition

KW - hollow cathode discharge

KW - inner surface

UR - http://www.scopus.com/inward/record.url?scp=84892749231&partnerID=8YFLogxK

U2 - 10.1088/1009-0630/16/1/14

DO - 10.1088/1009-0630/16/1/14

M3 - Article

AN - SCOPUS:84892749231

SN - 1009-0630

VL - 16

SP - 63

EP - 67

JO - Plasma Science and Technology

JF - Plasma Science and Technology

IS - 1

ER -

Deposition of diamond-like carbon on inner surface by hollow cathode discharge

摘要

访问文件

其它文件与链接

指纹

引用此