Deposition of diamond-like carbon on inner surface by hollow cathode discharge

Shichao Li; Feng He; Qi Guo; Jiting Ouyang

doi:10.1088/1009-0630/16/1/14

Deposition of diamond-like carbon on inner surface by hollow cathode discharge

Shichao Li, Feng He, Qi Guo, Jiting Ouyang^*

^*Corresponding author for this work

School of Physics

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

A cylindrical hollow cathode discharge (HCD) in CH₄/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon (DLC) films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma images and the optical emission spectrum (OES) were measured in Ar and CH₄/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy (SEM). The results show that the electron excitation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp ³/sp² bonds decreases with the applied voltage and the deposition time. The optimizing CH₄ content was found to be around CH₄/Ar = 1/5 for good quality of DLC films in the present system.

Original language	English
Pages (from-to)	63-67
Number of pages	5
Journal	Plasma Science and Technology
Volume	16
Issue number	1
DOIs	https://doi.org/10.1088/1009-0630/16/1/14
Publication status	Published - Jan 2014

Keywords

diamond-like carbon
film deposition
hollow cathode discharge
inner surface

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10.1088/1009-0630/16/1/14

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title = "Deposition of diamond-like carbon on inner surface by hollow cathode discharge",

abstract = "A cylindrical hollow cathode discharge (HCD) in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon (DLC) films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma images and the optical emission spectrum (OES) were measured in Ar and CH4/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy (SEM). The results show that the electron excitation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp 3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar = 1/5 for good quality of DLC films in the present system.",

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author = "Shichao Li and Feng He and Qi Guo and Jiting Ouyang",

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T1 - Deposition of diamond-like carbon on inner surface by hollow cathode discharge

AU - Li, Shichao

AU - He, Feng

AU - Guo, Qi

AU - Ouyang, Jiting

PY - 2014/1

Y1 - 2014/1

N2 - A cylindrical hollow cathode discharge (HCD) in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon (DLC) films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma images and the optical emission spectrum (OES) were measured in Ar and CH4/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy (SEM). The results show that the electron excitation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp 3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar = 1/5 for good quality of DLC films in the present system.

AB - A cylindrical hollow cathode discharge (HCD) in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon (DLC) films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma images and the optical emission spectrum (OES) were measured in Ar and CH4/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy (SEM). The results show that the electron excitation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp 3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar = 1/5 for good quality of DLC films in the present system.

KW - diamond-like carbon

KW - film deposition

KW - hollow cathode discharge

KW - inner surface

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Deposition of diamond-like carbon on inner surface by hollow cathode discharge

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Keywords

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