摘要
The comb-shaped capacitive micro-machined gyroscope employing an electrostatic comb drive and capacitive sensing structure is a typical type of MEMS sensor. Because of design and processing limitation and other factors, there are problems related to parallelism, dimensional accuracy and shape accuracy of the fabricated comb capacitor. These problems induce error into the calculation of the capacitance of the comb capacitor. The capacitance of the comb capacitor can be better calculated by the modeling the corner effect with various equipotential lines.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | Micro-Nano Technology XV |
| 出版商 | Trans Tech Publications Ltd. |
| 页 | 831-836 |
| 页数 | 6 |
| ISBN（印刷版） | 9783038350712 |
| DOI | |
| 出版状态 | 已出版 - 2014 |
| 活动 | 15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013 - Tianjin, 中国 期限: 3 11月 2013 → 6 11月 2013 |
出版系列
| 姓名 | Key Engineering Materials |
|---|---|
| 卷 | 609-610 |
| ISSN（印刷版） | 1013-9826 |
| ISSN（电子版） | 1662-9795 |
会议
| 会议 | 15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013 |
|---|---|
| 国家/地区 | 中国 |
| 市 | Tianjin |
| 时期 | 3/11/13 → 6/11/13 |
指纹
探究 'Corner effect of micro-comb capacitive structure' 的科研主题。它们共同构成独一无二的指纹。引用此
Liu, H., Gao, S., Jin, L., & He, Y. (2014). Corner effect of micro-comb capacitive structure. 在 Micro-Nano Technology XV (页码 831-836). (Key Engineering Materials; 卷 609-610). Trans Tech Publications Ltd.. https://doi.org/10.4028/www.scientific.net/KEM.609-610.831