@inproceedings{a4c5a5639e6b4a42b2ab74cbd0635a7f,
title = "Corner effect of micro-comb capacitive structure",
abstract = "The comb-shaped capacitive micro-machined gyroscope employing an electrostatic comb drive and capacitive sensing structure is a typical type of MEMS sensor. Because of design and processing limitation and other factors, there are problems related to parallelism, dimensional accuracy and shape accuracy of the fabricated comb capacitor. These problems induce error into the calculation of the capacitance of the comb capacitor. The capacitance of the comb capacitor can be better calculated by the modeling the corner effect with various equipotential lines.",
keywords = "Comb capacitor, Coner effect, Micro-machined gyroscope",
author = "Haipeng Liu and Shiqiao Gao and Lei Jin and Yunli He",
year = "2014",
doi = "10.4028/www.scientific.net/KEM.609-610.831",
language = "English",
isbn = "9783038350712",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd.",
pages = "831--836",
booktitle = "Micro-Nano Technology XV",
address = "Switzerland",
note = "15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013 ; Conference date: 03-11-2013 Through 06-11-2013",
}