Abstract
The comb-shaped capacitive micro-machined gyroscope employing an electrostatic comb drive and capacitive sensing structure is a typical type of MEMS sensor. Because of design and processing limitation and other factors, there are problems related to parallelism, dimensional accuracy and shape accuracy of the fabricated comb capacitor. These problems induce error into the calculation of the capacitance of the comb capacitor. The capacitance of the comb capacitor can be better calculated by the modeling the corner effect with various equipotential lines.
| Original language | English |
|---|---|
| Title of host publication | Micro-Nano Technology XV |
| Publisher | Trans Tech Publications Ltd. |
| Pages | 831-836 |
| Number of pages | 6 |
| ISBN (Print) | 9783038350712 |
| DOIs | |
| Publication status | Published - 2014 |
| Event | 15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013 - Tianjin, China Duration: 3 Nov 2013 → 6 Nov 2013 |
Publication series
| Name | Key Engineering Materials |
|---|---|
| Volume | 609-610 |
| ISSN (Print) | 1013-9826 |
| ISSN (Electronic) | 1662-9795 |
Conference
| Conference | 15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013 |
|---|---|
| Country/Territory | China |
| City | Tianjin |
| Period | 3/11/13 → 6/11/13 |
Keywords
- Comb capacitor
- Coner effect
- Micro-machined gyroscope
Fingerprint
Dive into the research topics of 'Corner effect of micro-comb capacitive structure'. Together they form a unique fingerprint.Cite this
Liu, H., Gao, S., Jin, L., & He, Y. (2014). Corner effect of micro-comb capacitive structure. In Micro-Nano Technology XV (pp. 831-836). (Key Engineering Materials; Vol. 609-610). Trans Tech Publications Ltd.. https://doi.org/10.4028/www.scientific.net/KEM.609-610.831