Computer generated hologram null compensator for optical metrology of a freeform surface

M. M. Talha; Jun Chang; Yongtian Wang; Dewen Cheng; Tingcheng Zhang; M. Aslam; A. Naeem Khan

doi:10.1016/j.ijleo.2009.09.009

Computer generated hologram null compensator for optical metrology of a freeform surface

M. M. Talha, Jun Chang, Yongtian Wang^*, Dewen Cheng, Tingcheng Zhang, M. Aslam, A. Naeem Khan

^*此作品的通讯作者

光电学院

科研成果: 期刊稿件 › 文章 › 同行评审

6 引用（Scopus）

摘要

A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.

源语言	英语
页（从-至）	2262-2265
页数	4
期刊	Optik
卷	121
期	24
DOI	https://doi.org/10.1016/j.ijleo.2009.09.009
出版状态	已出版 - 12月 2010

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10.1016/j.ijleo.2009.09.009

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title = "Computer generated hologram null compensator for optical metrology of a freeform surface",

abstract = "A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.",

keywords = "CGH, Freeform surface, Optical metrology, Optimization, Testing method",

author = "Talha, {M. M.} and Jun Chang and Yongtian Wang and Dewen Cheng and Tingcheng Zhang and M. Aslam and Khan, {A. Naeem}",

year = "2010",

month = dec,

doi = "10.1016/j.ijleo.2009.09.009",

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T1 - Computer generated hologram null compensator for optical metrology of a freeform surface

AU - Talha, M. M.

AU - Chang, Jun

AU - Wang, Yongtian

AU - Cheng, Dewen

AU - Zhang, Tingcheng

AU - Aslam, M.

AU - Khan, A. Naeem

PY - 2010/12

Y1 - 2010/12

N2 - A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.

AB - A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.

KW - CGH

KW - Freeform surface

KW - Optical metrology

KW - Optimization

KW - Testing method

UR - http://www.scopus.com/inward/record.url?scp=78751531761&partnerID=8YFLogxK

U2 - 10.1016/j.ijleo.2009.09.009

DO - 10.1016/j.ijleo.2009.09.009

M3 - Article

AN - SCOPUS:78751531761

SN - 0030-4026

VL - 121

SP - 2262

EP - 2265

JO - Optik

JF - Optik

IS - 24

ER -

Computer generated hologram null compensator for optical metrology of a freeform surface

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