Computer generated hologram null compensator for optical metrology of a freeform surface

M. M. Talha; Jun Chang; Yongtian Wang; Dewen Cheng; Tingcheng Zhang; M. Aslam; A. Naeem Khan

doi:10.1016/j.ijleo.2009.09.009

Computer generated hologram null compensator for optical metrology of a freeform surface

M. M. Talha, Jun Chang, Yongtian Wang^*, Dewen Cheng, Tingcheng Zhang, M. Aslam, A. Naeem Khan

^*Corresponding author for this work

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.

Original language	English
Pages (from-to)	2262-2265
Number of pages	4
Journal	Optik
Volume	121
Issue number	24
DOIs	https://doi.org/10.1016/j.ijleo.2009.09.009
Publication status	Published - Dec 2010

Keywords

CGH
Freeform surface
Optical metrology
Optimization
Testing method

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10.1016/j.ijleo.2009.09.009

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title = "Computer generated hologram null compensator for optical metrology of a freeform surface",

abstract = "A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.",

keywords = "CGH, Freeform surface, Optical metrology, Optimization, Testing method",

author = "Talha, {M. M.} and Jun Chang and Yongtian Wang and Dewen Cheng and Tingcheng Zhang and M. Aslam and Khan, {A. Naeem}",

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AU - Talha, M. M.

AU - Chang, Jun

AU - Wang, Yongtian

AU - Cheng, Dewen

AU - Zhang, Tingcheng

AU - Aslam, M.

AU - Khan, A. Naeem

PY - 2010/12

Y1 - 2010/12

N2 - A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.

AB - A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.

KW - CGH

KW - Freeform surface

KW - Optical metrology

KW - Optimization

KW - Testing method

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VL - 121

SP - 2262

EP - 2265

JO - Optik

JF - Optik

IS - 24

ER -

Computer generated hologram null compensator for optical metrology of a freeform surface

Abstract

Keywords

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