TY - JOUR
T1 - AuCl3掺杂对碳纳米管晶体管的电学性能调控及特性分析
AU - Song, Ming Xu
AU - Wang, Huai Peng
AU - Sun, Yi Lin
AU - Cai, Li
AU - Yang, Xiao Kuo
AU - Xie, Dan
N1 - Publisher Copyright:
© 2021 Chinese Physical Society.
PY - 2021/12/5
Y1 - 2021/12/5
N2 - Carbon nanotube-based field-effect transistors (CNFETs), as a new generation of nanodevices, are still difficult to apply to actual logic circuits due to the lack of a mature threshold voltage control mechanism. Here in this work, a feasible and large-scale processing surface doping method is demonstrated to effectively modulate the threshold voltage of CNFETs through the p-type doping effect of gold chloride (AuCl3). A comprehensive mapping from electrical parameters (Ion/Ioff, Vth and mobility) to doping concentration is carefully investigated, demonstrating a p-doping effect induced by surface charge transfer between Au3+ and carbon nanotube networks (CNTs). Threshold voltage of CNFETs can be effectively adjusted by varying the doping concentration. More importantly, the devices doped with low concentration AuCl3exhibit good electrical properties including greatly improved electrical conductivity, 2-3 times higher in mobility than intrinsic carbon nanotubes. Furthermore, the effects of annealing on the electrical properties of the AuCl3-doping CNFETs are studied, demonstrating that the p-type doping effect reaches the optimized state at a temperature of 50 ℃. Finally, first-principles calculation method is used to verify the doping control mechanism of Au3+to carbon nanotubes. This research provides important guidance for realizing large-area low-power logic circuits and high-performance electronic devices in the future.
AB - Carbon nanotube-based field-effect transistors (CNFETs), as a new generation of nanodevices, are still difficult to apply to actual logic circuits due to the lack of a mature threshold voltage control mechanism. Here in this work, a feasible and large-scale processing surface doping method is demonstrated to effectively modulate the threshold voltage of CNFETs through the p-type doping effect of gold chloride (AuCl3). A comprehensive mapping from electrical parameters (Ion/Ioff, Vth and mobility) to doping concentration is carefully investigated, demonstrating a p-doping effect induced by surface charge transfer between Au3+ and carbon nanotube networks (CNTs). Threshold voltage of CNFETs can be effectively adjusted by varying the doping concentration. More importantly, the devices doped with low concentration AuCl3exhibit good electrical properties including greatly improved electrical conductivity, 2-3 times higher in mobility than intrinsic carbon nanotubes. Furthermore, the effects of annealing on the electrical properties of the AuCl3-doping CNFETs are studied, demonstrating that the p-type doping effect reaches the optimized state at a temperature of 50 ℃. Finally, first-principles calculation method is used to verify the doping control mechanism of Au3+to carbon nanotubes. This research provides important guidance for realizing large-area low-power logic circuits and high-performance electronic devices in the future.
KW - Carbon nanotube networks
KW - Density functional theory
KW - Surface doping
KW - Threshold voltage modulation
UR - http://www.scopus.com/inward/record.url?scp=85120920280&partnerID=8YFLogxK
U2 - 10.7498/aps.70.20211026
DO - 10.7498/aps.70.20211026
M3 - 文章
AN - SCOPUS:85120920280
SN - 1000-3290
VL - 70
JO - Wuli Xuebao/Acta Physica Sinica
JF - Wuli Xuebao/Acta Physica Sinica
IS - 23
M1 - 238801
ER -