摘要
The micro-machined gyroscope is a kind of typical micro-electro-mechanical sensor, its typical working mode is electrostatic drive and comb capacitive detection. As for as the transverse detection capacitance structure now commonly used, we find out that the relationship between capacitance variation and displacement is nonlinear through analyzing its detection capacitance. This nonlinearity will greatly affect the dynamic performance of micro-machined gyroscope.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | Frontiers of Manufacturing and Design Science II |
| 页 | 33-37 |
| 页数 | 5 |
| DOI | |
| 出版状态 | 已出版 - 2012 |
| 活动 | 2nd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2011 - Taichung, 中国台湾 期限: 11 12月 2011 → 13 12月 2011 |
出版系列
| 姓名 | Applied Mechanics and Materials |
|---|---|
| 卷 | 121-126 |
| ISSN（印刷版） | 1660-9336 |
| ISSN（电子版） | 1662-7482 |
会议
| 会议 | 2nd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2011 |
|---|---|
| 国家/地区 | 中国台湾 |
| 市 | Taichung |
| 时期 | 11/12/11 → 13/12/11 |
指纹
探究 'Analysis on the detection capacitance of comb micro-machined gyroscope' 的科研主题。它们共同构成独一无二的指纹。引用此
Liu, H. P., Gao, S. Q., & Jin, L. (2012). Analysis on the detection capacitance of comb micro-machined gyroscope. 在 Frontiers of Manufacturing and Design Science II (页码 33-37). (Applied Mechanics and Materials; 卷 121-126). https://doi.org/10.4028/www.scientific.net/AMM.121-126.33