@inproceedings{7f4fd4c282994774a56a61a7621cc9ac,
title = "Analysis on the detection capacitance of comb micro-machined gyroscope",
abstract = "The micro-machined gyroscope is a kind of typical micro-electro-mechanical sensor, its typical working mode is electrostatic drive and comb capacitive detection. As for as the transverse detection capacitance structure now commonly used, we find out that the relationship between capacitance variation and displacement is nonlinear through analyzing its detection capacitance. This nonlinearity will greatly affect the dynamic performance of micro-machined gyroscope.",
keywords = "Comb capacitance, Detection capacitance, Micro-machined gyroscope, Nonlinearity",
author = "Liu, {Hai Peng} and Gao, {Shi Qiao} and Lei Jin",
year = "2012",
doi = "10.4028/www.scientific.net/AMM.121-126.33",
language = "English",
isbn = "9783037852828",
series = "Applied Mechanics and Materials",
pages = "33--37",
booktitle = "Frontiers of Manufacturing and Design Science II",
note = "2nd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2011 ; Conference date: 11-12-2011 Through 13-12-2011",
}