Abstract
The micro-machined gyroscope is a kind of typical micro-electro-mechanical sensor, its typical working mode is electrostatic drive and comb capacitive detection. As for as the transverse detection capacitance structure now commonly used, we find out that the relationship between capacitance variation and displacement is nonlinear through analyzing its detection capacitance. This nonlinearity will greatly affect the dynamic performance of micro-machined gyroscope.
| Original language | English |
|---|---|
| Title of host publication | Frontiers of Manufacturing and Design Science II |
| Pages | 33-37 |
| Number of pages | 5 |
| DOIs | |
| Publication status | Published - 2012 |
| Event | 2nd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2011 - Taichung, Taiwan, Province of China Duration: 11 Dec 2011 → 13 Dec 2011 |
Publication series
| Name | Applied Mechanics and Materials |
|---|---|
| Volume | 121-126 |
| ISSN (Print) | 1660-9336 |
| ISSN (Electronic) | 1662-7482 |
Conference
| Conference | 2nd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2011 |
|---|---|
| Country/Territory | Taiwan, Province of China |
| City | Taichung |
| Period | 11/12/11 → 13/12/11 |
Keywords
- Comb capacitance
- Detection capacitance
- Micro-machined gyroscope
- Nonlinearity
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Liu, H. P., Gao, S. Q., & Jin, L. (2012). Analysis on the detection capacitance of comb micro-machined gyroscope. In Frontiers of Manufacturing and Design Science II (pp. 33-37). (Applied Mechanics and Materials; Vol. 121-126). https://doi.org/10.4028/www.scientific.net/AMM.121-126.33