TY - GEN
T1 - Analysis of micro structure's elastic stiffness
AU - Shen, Li
AU - Gao, Shiqiao
AU - Jiang, Anran
AU - Wang, Caifeng
PY - 2012
Y1 - 2012
N2 - Based on the calculation and analysis of three kinds of elastic beam's stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement, forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam's width, the bow beam's force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam's stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.
AB - Based on the calculation and analysis of three kinds of elastic beam's stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement, forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam's width, the bow beam's force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam's stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.
KW - ANSYS
KW - Beams
KW - Micro gyroscope
KW - Stiffness
UR - http://www.scopus.com/inward/record.url?scp=84868537623&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMM.184-185.890
DO - 10.4028/www.scientific.net/AMM.184-185.890
M3 - Conference contribution
AN - SCOPUS:84868537623
SN - 9783037854419
T3 - Applied Mechanics and Materials
SP - 890
EP - 895
BT - Frontiers of Mechanical Engineering and Materials Engineering
T2 - 2012 International Conference on Frontiers of Mechanical Engineering and Materials Engineering, MEME 2012
Y2 - 27 July 2012 through 29 July 2012
ER -