Analysis of micro structure's elastic stiffness

Li Shen; Shiqiao Gao; Anran Jiang; Caifeng Wang

doi:10.4028/www.scientific.net/AMM.184-185.890

Analysis of micro structure's elastic stiffness

Li Shen^*, Shiqiao Gao, Anran Jiang, Caifeng Wang

^*Corresponding author for this work

School of Mechatronical Engineering

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Based on the calculation and analysis of three kinds of elastic beam's stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement, forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam's width, the bow beam's force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam's stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.

Original language	English
Title of host publication	Frontiers of Mechanical Engineering and Materials Engineering
Pages	890-895
Number of pages	6
DOIs	https://doi.org/10.4028/www.scientific.net/AMM.184-185.890
Publication status	Published - 2012
Event	2012 International Conference on Frontiers of Mechanical Engineering and Materials Engineering, MEME 2012 - Hong Kong, Hong Kong Duration: 27 Jul 2012 → 29 Jul 2012

Publication series

Name	Applied Mechanics and Materials
Volume	184-185
ISSN (Print)	1660-9336
ISSN (Electronic)	1662-7482

Conference

Conference	2012 International Conference on Frontiers of Mechanical Engineering and Materials Engineering, MEME 2012
Country/Territory	Hong Kong
City	Hong Kong
Period	27/07/12 → 29/07/12

Keywords

ANSYS
Beams
Micro gyroscope
Stiffness

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10.4028/www.scientific.net/AMM.184-185.890

Cite this

@inproceedings{87e450d3c97942c192e5bb6324c03b9b,

title = "Analysis of micro structure's elastic stiffness",

abstract = "Based on the calculation and analysis of three kinds of elastic beam's stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement, forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam's width, the bow beam's force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam's stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.",

keywords = "ANSYS, Beams, Micro gyroscope, Stiffness",

author = "Li Shen and Shiqiao Gao and Anran Jiang and Caifeng Wang",

year = "2012",

doi = "10.4028/www.scientific.net/AMM.184-185.890",

language = "English",

isbn = "9783037854419",

series = "Applied Mechanics and Materials",

pages = "890--895",

booktitle = "Frontiers of Mechanical Engineering and Materials Engineering",

note = "2012 International Conference on Frontiers of Mechanical Engineering and Materials Engineering, MEME 2012 ; Conference date: 27-07-2012 Through 29-07-2012",

}

Shen, L, Gao, S, Jiang, A & Wang, C 2012, Analysis of micro structure's elastic stiffness. in Frontiers of Mechanical Engineering and Materials Engineering. Applied Mechanics and Materials, vol. 184-185, pp. 890-895, 2012 International Conference on Frontiers of Mechanical Engineering and Materials Engineering, MEME 2012, Hong Kong, Hong Kong, 27/07/12. https://doi.org/10.4028/www.scientific.net/AMM.184-185.890

TY - GEN

T1 - Analysis of micro structure's elastic stiffness

AU - Shen, Li

AU - Gao, Shiqiao

AU - Jiang, Anran

AU - Wang, Caifeng

PY - 2012

Y1 - 2012

N2 - Based on the calculation and analysis of three kinds of elastic beam's stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement, forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam's width, the bow beam's force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam's stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.

AB - Based on the calculation and analysis of three kinds of elastic beam's stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement, forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam's width, the bow beam's force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam's stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.

KW - ANSYS

KW - Beams

KW - Micro gyroscope

KW - Stiffness

UR - http://www.scopus.com/inward/record.url?scp=84868537623&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMM.184-185.890

DO - 10.4028/www.scientific.net/AMM.184-185.890

M3 - Conference contribution

AN - SCOPUS:84868537623

SN - 9783037854419

T3 - Applied Mechanics and Materials

SP - 890

EP - 895

BT - Frontiers of Mechanical Engineering and Materials Engineering

T2 - 2012 International Conference on Frontiers of Mechanical Engineering and Materials Engineering, MEME 2012

Y2 - 27 July 2012 through 29 July 2012

ER -

Analysis of micro structure's elastic stiffness

Abstract

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Keywords

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