@inproceedings{bcfa7aae246141b5a5b8689e106e43ab,
title = "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten",
abstract = "This paper reports an ultra-fast electrothermal bimorph micromirror with an inverse-series-connected bimorph actuator, which is made up of Cu-W bimorph. This mirror has a high rotational resonant frequency of 12.8 kHz.",
keywords = "Bimorph actuator, MEMS, electrothermal actuation, fast scanner, micromirror, resonant scanning",
author = "Dingkang Wang and Xiaoyang Zhang and Liang Zhou and Mengyue Liang and Daihua Zhang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 ; Conference date: 13-08-2017 Through 17-08-2017",
year = "2017",
month = sep,
day = "26",
doi = "10.1109/OMN.2017.8051478",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings",
address = "United States",
}