An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten

Dingkang Wang; Xiaoyang Zhang; Liang Zhou; Mengyue Liang; Daihua Zhang; Huikai Xie

doi:10.1109/OMN.2017.8051478

An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten

Dingkang Wang, Xiaoyang Zhang, Liang Zhou, Mengyue Liang, Daihua Zhang, Huikai Xie

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

15 Citations (Scopus)

Abstract

This paper reports an ultra-fast electrothermal bimorph micromirror with an inverse-series-connected bimorph actuator, which is made up of Cu-W bimorph. This mirror has a high rotational resonant frequency of 12.8 kHz.

Original language	English
Title of host publication	2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538607374
DOIs	https://doi.org/10.1109/OMN.2017.8051478
Publication status	Published - 26 Sept 2017
Externally published	Yes
Event	22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States Duration: 13 Aug 2017 → 17 Aug 2017

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
Country/Territory	United States
City	Santa Fe
Period	13/08/17 → 17/08/17

Keywords

Bimorph actuator
MEMS
electrothermal actuation
fast scanner
micromirror
resonant scanning

Access to Document

10.1109/OMN.2017.8051478

Cite this

Wang, D., Zhang, X., Zhou, L., Liang, M., Zhang, D., & Xie, H. (2017). An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten. In 2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings Article 8051478 (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2017.8051478

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title = "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten",

abstract = "This paper reports an ultra-fast electrothermal bimorph micromirror with an inverse-series-connected bimorph actuator, which is made up of Cu-W bimorph. This mirror has a high rotational resonant frequency of 12.8 kHz.",

keywords = "Bimorph actuator, MEMS, electrothermal actuation, fast scanner, micromirror, resonant scanning",

author = "Dingkang Wang and Xiaoyang Zhang and Liang Zhou and Mengyue Liang and Daihua Zhang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 ; Conference date: 13-08-2017 Through 17-08-2017",

year = "2017",

month = sep,

day = "26",

doi = "10.1109/OMN.2017.8051478",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings",

address = "United States",

}

Wang, D, Zhang, X, Zhou, L, Liang, M, Zhang, D & Xie, H 2017, An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten. in 2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings., 8051478, International Conference on Optical MEMS and Nanophotonics, IEEE Computer Society, 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017, Santa Fe, United States, 13/08/17. https://doi.org/10.1109/OMN.2017.8051478

An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten. / Wang, Dingkang; Zhang, Xiaoyang; Zhou, Liang et al.
2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings. IEEE Computer Society, 2017. 8051478 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten

AU - Wang, Dingkang

AU - Zhang, Xiaoyang

AU - Zhou, Liang

AU - Liang, Mengyue

AU - Zhang, Daihua

AU - Xie, Huikai

PY - 2017/9/26

Y1 - 2017/9/26

N2 - This paper reports an ultra-fast electrothermal bimorph micromirror with an inverse-series-connected bimorph actuator, which is made up of Cu-W bimorph. This mirror has a high rotational resonant frequency of 12.8 kHz.

AB - This paper reports an ultra-fast electrothermal bimorph micromirror with an inverse-series-connected bimorph actuator, which is made up of Cu-W bimorph. This mirror has a high rotational resonant frequency of 12.8 kHz.

KW - Bimorph actuator

KW - MEMS

KW - electrothermal actuation

KW - fast scanner

KW - micromirror

KW - resonant scanning

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M3 - Conference contribution

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T3 - International Conference on Optical MEMS and Nanophotonics

BT - 2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings

PB - IEEE Computer Society

T2 - 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017

Y2 - 13 August 2017 through 17 August 2017

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An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten

Abstract

Publication series

Conference

Keywords

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