A novel MEMS fractal inductor based on Hilbert curve

Gang Wang; Lixin Xu; Ting Wang

doi:10.1109/CICN.2012.31

A novel MEMS fractal inductor based on Hilbert curve

Gang Wang^*, Lixin Xu, Ting Wang

^*此作品的通讯作者

科研成果: 会议稿件 › 论文 › 同行评审

12 引用（Scopus）

摘要

Being critical component in high performance, MMIC On-chip inductor plays an important role in modern microwave communication facilities. A novel MEMS fractal inductor based on Hilbert curve is presented. By using MEMS technique, inductor is fabricated on silicon substrate with geometry of fractal Hilbert curve pattern. The back side of substrate is etched to generate suspended thin film structure. The fabrication technique is compatible with CMOS process. Compared with planer spiral and winding form inductor, the inductance of MEMS fractal inductor improved more than 50%. The MEMS fractal inductor can be integrated with MMIC chip and satisfy the demand for modern RF communication devices.

源语言	英语
页	241-244
页数	4
DOI	https://doi.org/10.1109/CICN.2012.31
出版状态	已出版 - 2012
活动	4th International Conference on Computational Intelligence and Communication Networks, CICN 2012 - Mathura, Uttar Pradesh, 印度期限: 3 11月 2012 → 5 11月 2012

会议

会议	4th International Conference on Computational Intelligence and Communication Networks, CICN 2012
国家/地区	印度
市	Mathura, Uttar Pradesh
时期	3/11/12 → 5/11/12

访问文件

10.1109/CICN.2012.31

其它文件与链接

链接到 Scopus 的出版物

引用此

@conference{152cd7556c5145cb8c0471b48e85e8e1,

title = "A novel MEMS fractal inductor based on Hilbert curve",

abstract = "Being critical component in high performance, MMIC On-chip inductor plays an important role in modern microwave communication facilities. A novel MEMS fractal inductor based on Hilbert curve is presented. By using MEMS technique, inductor is fabricated on silicon substrate with geometry of fractal Hilbert curve pattern. The back side of substrate is etched to generate suspended thin film structure. The fabrication technique is compatible with CMOS process. Compared with planer spiral and winding form inductor, the inductance of MEMS fractal inductor improved more than 50%. The MEMS fractal inductor can be integrated with MMIC chip and satisfy the demand for modern RF communication devices.",

keywords = "Hilbert curve, MEMS, fractal, inductor",

author = "Gang Wang and Lixin Xu and Ting Wang",

year = "2012",

doi = "10.1109/CICN.2012.31",

language = "English",

pages = "241--244",

note = "4th International Conference on Computational Intelligence and Communication Networks, CICN 2012 ; Conference date: 03-11-2012 Through 05-11-2012",

}

TY - CONF

T1 - A novel MEMS fractal inductor based on Hilbert curve

AU - Wang, Gang

AU - Xu, Lixin

AU - Wang, Ting

PY - 2012

Y1 - 2012

N2 - Being critical component in high performance, MMIC On-chip inductor plays an important role in modern microwave communication facilities. A novel MEMS fractal inductor based on Hilbert curve is presented. By using MEMS technique, inductor is fabricated on silicon substrate with geometry of fractal Hilbert curve pattern. The back side of substrate is etched to generate suspended thin film structure. The fabrication technique is compatible with CMOS process. Compared with planer spiral and winding form inductor, the inductance of MEMS fractal inductor improved more than 50%. The MEMS fractal inductor can be integrated with MMIC chip and satisfy the demand for modern RF communication devices.

AB - Being critical component in high performance, MMIC On-chip inductor plays an important role in modern microwave communication facilities. A novel MEMS fractal inductor based on Hilbert curve is presented. By using MEMS technique, inductor is fabricated on silicon substrate with geometry of fractal Hilbert curve pattern. The back side of substrate is etched to generate suspended thin film structure. The fabrication technique is compatible with CMOS process. Compared with planer spiral and winding form inductor, the inductance of MEMS fractal inductor improved more than 50%. The MEMS fractal inductor can be integrated with MMIC chip and satisfy the demand for modern RF communication devices.

KW - Hilbert curve

KW - MEMS

KW - fractal

KW - inductor

UR - http://www.scopus.com/inward/record.url?scp=84872047582&partnerID=8YFLogxK

U2 - 10.1109/CICN.2012.31

DO - 10.1109/CICN.2012.31

M3 - Paper

AN - SCOPUS:84872047582

SP - 241

EP - 244

T2 - 4th International Conference on Computational Intelligence and Communication Networks, CICN 2012

Y2 - 3 November 2012 through 5 November 2012

ER -

A novel MEMS fractal inductor based on Hilbert curve

摘要

会议

访问文件

其它文件与链接

指纹

引用此