A novel MEMS fractal inductor based on Hilbert curve

Gang Wang; Lixin Xu; Ting Wang

doi:10.1109/CICN.2012.31

A novel MEMS fractal inductor based on Hilbert curve

Gang Wang^*, Lixin Xu, Ting Wang

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

12 Citations (Scopus)

Abstract

Being critical component in high performance, MMIC On-chip inductor plays an important role in modern microwave communication facilities. A novel MEMS fractal inductor based on Hilbert curve is presented. By using MEMS technique, inductor is fabricated on silicon substrate with geometry of fractal Hilbert curve pattern. The back side of substrate is etched to generate suspended thin film structure. The fabrication technique is compatible with CMOS process. Compared with planer spiral and winding form inductor, the inductance of MEMS fractal inductor improved more than 50%. The MEMS fractal inductor can be integrated with MMIC chip and satisfy the demand for modern RF communication devices.

Original language	English
Pages	241-244
Number of pages	4
DOIs	https://doi.org/10.1109/CICN.2012.31
Publication status	Published - 2012
Event	4th International Conference on Computational Intelligence and Communication Networks, CICN 2012 - Mathura, Uttar Pradesh, India Duration: 3 Nov 2012 → 5 Nov 2012

Conference

Conference	4th International Conference on Computational Intelligence and Communication Networks, CICN 2012
Country/Territory	India
City	Mathura, Uttar Pradesh
Period	3/11/12 → 5/11/12

Keywords

Hilbert curve
MEMS
fractal
inductor

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10.1109/CICN.2012.31

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AU - Wang, Gang

AU - Xu, Lixin

AU - Wang, Ting

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AB - Being critical component in high performance, MMIC On-chip inductor plays an important role in modern microwave communication facilities. A novel MEMS fractal inductor based on Hilbert curve is presented. By using MEMS technique, inductor is fabricated on silicon substrate with geometry of fractal Hilbert curve pattern. The back side of substrate is etched to generate suspended thin film structure. The fabrication technique is compatible with CMOS process. Compared with planer spiral and winding form inductor, the inductance of MEMS fractal inductor improved more than 50%. The MEMS fractal inductor can be integrated with MMIC chip and satisfy the demand for modern RF communication devices.

KW - Hilbert curve

KW - MEMS

KW - fractal

KW - inductor

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DO - 10.1109/CICN.2012.31

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T2 - 4th International Conference on Computational Intelligence and Communication Networks, CICN 2012

Y2 - 3 November 2012 through 5 November 2012

ER -

A novel MEMS fractal inductor based on Hilbert curve

Abstract

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Keywords

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