摘要
A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micromirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | IEEE/LEOS Optical MEMS 2005 |
| 主期刊副标题 | International Conference on Optical MEMS and Their Applications |
| 页 | 27-28 |
| 页数 | 2 |
| DOI | |
| 出版状态 | 已出版 - 2005 |
| 已对外发布 | 是 |
| 活动 | IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, 芬兰 期限: 1 8月 2005 → 4 8月 2005 |
出版系列
| 姓名 | IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications |
|---|
会议
| 会议 | IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications |
|---|---|
| 国家/地区 | 芬兰 |
| 市 | Oulu |
| 时期 | 1/08/05 → 4/08/05 |
指纹
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Todd, S. T., Jain, A., Qu, H., & Xie, H. (2005). A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion. 在 IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (页码 27-28). 文章 1540059 (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). https://doi.org/10.1109/OMEMS.2005.1540059