Abstract
A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micromirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators.
Original language | English |
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Title of host publication | IEEE/LEOS Optical MEMS 2005 |
Subtitle of host publication | International Conference on Optical MEMS and Their Applications |
Pages | 27-28 |
Number of pages | 2 |
DOIs | |
Publication status | Published - 2005 |
Externally published | Yes |
Event | IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland Duration: 1 Aug 2005 → 4 Aug 2005 |
Publication series
Name | IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications |
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Conference
Conference | IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications |
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Country/Territory | Finland |
City | Oulu |
Period | 1/08/05 → 4/08/05 |
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Todd, S. T., Jain, A., Qu, H., & Xie, H. (2005). A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion. In IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (pp. 27-28). Article 1540059 (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). https://doi.org/10.1109/OMEMS.2005.1540059