A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

Shane T. Todd*, Ankur Jain, Hongwei Qu, Huikai Xie

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micromirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators.

Original languageEnglish
Title of host publicationIEEE/LEOS Optical MEMS 2005
Subtitle of host publicationInternational Conference on Optical MEMS and Their Applications
Pages27-28
Number of pages2
DOIs
Publication statusPublished - 2005
Externally publishedYes
EventIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland
Duration: 1 Aug 20054 Aug 2005

Publication series

NameIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Conference

ConferenceIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Country/TerritoryFinland
CityOulu
Period1/08/054/08/05

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Todd, S. T., Jain, A., Qu, H., & Xie, H. (2005). A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion. In IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (pp. 27-28). Article 1540059 (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). https://doi.org/10.1109/OMEMS.2005.1540059