高精度共焦自准直中心偏测量装置

A confocal self-collimation centering measurement structure based on confocal axial sectioning method and horizontal self-collimation positioning is proposed, which uses the confocal method to measure the center and vertex positions of the tested spherical lens to obtain the curvature radius and uses the self-collimation light path to detect the position of the reflected light by tested lens on the detection surface during the rotation of the tested lens driven by the air shaft to get the center bias. Then combine the radius with center bias to obtain the decentration. Compared with the traditional decentration measurement structure, this structure measures the curvature radius and decentration of the tested lens at the same time, so it avoids the measurement error caused by the multiple clamping, effectively improves the measuring efficiency and accuracy, simplifies the measurement process and decreases the measurement cost. Experiment shows that the measurement uncertainty of the structure can reach 0.065".