高精度共焦自准直中心偏测量装置

Translated title of the contribution: Confocal self-collimation decentration measurement structure with high accuracy

Hong Ge, Yun Wang*, Lirong Qiu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A confocal self-collimation centering measurement structure based on confocal axial sectioning method and horizontal self-collimation positioning is proposed, which uses the confocal method to measure the center and vertex positions of the tested spherical lens to obtain the curvature radius and uses the self-collimation light path to detect the position of the reflected light by tested lens on the detection surface during the rotation of the tested lens driven by the air shaft to get the center bias. Then combine the radius with center bias to obtain the decentration. Compared with the traditional decentration measurement structure, this structure measures the curvature radius and decentration of the tested lens at the same time, so it avoids the measurement error caused by the multiple clamping, effectively improves the measuring efficiency and accuracy, simplifies the measurement process and decreases the measurement cost. Experiment shows that the measurement uncertainty of the structure can reach 0.065".

Translated title of the contributionConfocal self-collimation decentration measurement structure with high accuracy
Original languageChinese (Traditional)
Pages (from-to)681-685
Number of pages5
JournalGuangxue Jishu/Optical Technique
Volume44
Issue number6
Publication statusPublished - 1 Nov 2018

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