@inproceedings{7fc793d3012a4993a8d6e3d3d20ba97a,
title = "Transparent thin-film metrology with a high sensitivity transmission-mode quantitative phase microscope",
abstract = "A transmission-mode high sensitivity quantitative phase microscope (QPM) is developed for profiling transparent thin film structures. The QPM system is implemented with a common-path interferometry design and a high well-depth camera, which has allowed us to achieve an optical path length difference sensitivity of around 50 picometers. A frame averaging method can be used to further improve the sensitivity. To account for multiple interference within thin films, a transmission matrix model is developed to achieve accurate height profile reconstruction. With the correction model, the profiling accuracy can be improved from 20.6% to 4.0% for a MoS2 thin film with a thickness of around 25 nm.",
keywords = "High sensitivity imaging, Quantitative phase imaging, Thin-film metrology",
author = "Yujie Nie and Nansen Zhou and Li Tao and Guodong Zhou and Ni Zhao and Jianbin Xu and Renjie Zhou",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; Quantitative Phase Imaging VII 2021 ; Conference date: 06-03-2021 Through 11-03-2021",
year = "2021",
doi = "10.1117/12.2579035",
language = "English",
series = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",
publisher = "SPIE",
editor = "Yang Liu and Gabriel Popescu and YongKeun Park",
booktitle = "Quantitative Phase Imaging VII",
address = "United States",
}