@inproceedings{5d899024523145f99c5f931b91d884fa,
title = "Study on the stitching interferometry for the surface profile measurement of a large aperture component",
abstract = "The stitching interferometry for the surface profile measurement of a large aperture component is studied. To analyze the overlapping region interferogram of the adjacent subapertures with Scale Invariant Feature Transform(SIFT) algorithm, the stitching parameters of the adjacent subapertures and then overall surface information of the tested component can be obtained. SIFT algorithm of subaperture positioning, interferogram processing, phase unwrapping, Zernike polynomials wavefront fitting and subaperture wavefront stitching programs are written. A principle experiment has been carried out. Compared with the measurement results between the stitching interferometry and full caliber testing, the deviation of RMS is less than 2nm.",
keywords = "Large aperture component, SIFT algorithm, Zernike fitting, phase-shifting interferometry, subaperture stitching",
author = "Weirui Zhao and Lirong Qiu and Weiqian Zhao and Genrui Cao",
year = "2014",
doi = "10.1117/12.2053182",
language = "English",
isbn = "9781628410471",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
booktitle = "Dimensional Optical Metrology and Inspection for Practical Applications III",
address = "United States",
note = "Dimensional Optical Metrology and Inspection for Practical Applications III ; Conference date: 05-05-2014 Through 06-05-2014",
}