Abstract
To make the design and fabrication of planar W-form micro-springs based on MEMS technology convenient, expressions used to calculate the micro-spring made of different materials constant by its structural parameters are derived by energy method, and subsequently verified correct with tensile test and ANSYS finite element method using nickel planar W-form micro-springs. The stiffness response of the micro-spring to its structural parameters was also analyzed by the formula precedingly derived and the simulation results. Therefore the reliability and the optimization design of MEMS can be improved.
| Original language | English |
|---|---|
| Pages (from-to) | 471-474 |
| Number of pages | 4 |
| Journal | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
| Volume | 26 |
| Issue number | 6 |
| Publication status | Published - Jun 2006 |
Keywords
- Energy method
- Finite element method (FEM)
- MEMS spring
- Spring constant