TY - JOUR
T1 - Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation
AU - Xiong, Wei
AU - Zhou, Yun Shen
AU - He, Xiang Nan
AU - Gao, Yang
AU - Mahjouri-Samani, Masoud
AU - Jiang, Lan
AU - Baldacchini, Tommaso
AU - Lu, Yong Feng
PY - 2012
Y1 - 2012
N2 - Modern three-dimensional nanofabrication requires both additive and subtractive processes. However, both processes are largely isolated and generally regarded as incompatible with each other. In this study, we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond (fs) laser multiphoton ablation. To demonstrate the new capability, submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-mm diameter were successfully fabricated. This method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures, promising for a wide range of applications in integrated optics, microfluidics and microelectromechanical systems.
AB - Modern three-dimensional nanofabrication requires both additive and subtractive processes. However, both processes are largely isolated and generally regarded as incompatible with each other. In this study, we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond (fs) laser multiphoton ablation. To demonstrate the new capability, submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-mm diameter were successfully fabricated. This method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures, promising for a wide range of applications in integrated optics, microfluidics and microelectromechanical systems.
KW - Femtosecond laser direct writing
KW - Femtosecond laser multiphoton ablation
KW - Micro-/nanofabrication
KW - Two-photon polymerization
UR - http://www.scopus.com/inward/record.url?scp=84871846799&partnerID=8YFLogxK
U2 - 10.1038/lsa.2012.6
DO - 10.1038/lsa.2012.6
M3 - Article
AN - SCOPUS:84871846799
SN - 2047-7538
VL - 1
JO - Light: Science and Applications
JF - Light: Science and Applications
IS - APRIL
M1 - e6
ER -