Sapphire optical fiber high-temperature vibration sensor

Yang Cui, Yi Jiang*, Yutong Zhang, Xinxing Feng, Jie Hu, Lan Jiang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

Abstract

A sapphire fiber high-temperature vibration sensor with an extrinsic Fabry-Perot interferometer (EFPI) structure is proposed and experimentally demonstrated. The vibrating diaphragm of the sensor is a supported beam structure fabricated by etching a single-side polished sapphire wafer using a femtosecond laser. The FP cavity of the sensor is composed of the sapphire fiber end face and the polished surface of the vibrating diaphragm. The interference signal of the sensor is picked up by the sapphire fiber and transmitted to a laser interferometry demodulator through a multimode fiber. Experimental results show that the acceleration response is linear in the range of 0-10 g along with an acceleration sensitivity of 20.91 nm/g. The resonance frequency of the sensor is 2700 Hz, which is consistent with the ANSYS simulation results. The sensor can also work in the temperature range from room temperature to 1500 ℃, providing a feasible method for vibration measurements in high-temperature environments.

Original languageEnglish
Pages (from-to)1056-1065
Number of pages10
JournalOptics Express
Volume30
Issue number2
DOIs
Publication statusPublished - 17 Jan 2022

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