Abstract
A non-contact optical probe for surface profiling with up to 2nm position resolution over 100μm measurement range has been developed, which includes a confocal light path for non-contact position and a capacitance sensor for Z axis displacement measurement. The principle of the optical probe is based on differential confocal technique. The differential light-intensity distribution depends on the confocal axial response (or depth discrimination) properties. Using the diffraction theory, the mathematical analysis of the method has been performed. Validity of the mathematical theory analysis of the differential confocal technique is experimentally verified.
| Original language | English |
|---|---|
| Pages (from-to) | 194-197 |
| Number of pages | 4 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4222 |
| DOIs | |
| Publication status | Published - 2000 |
| Externally published | Yes |
| Event | Process Control and Inspection for Industry - Beijing, China Duration: 8 Nov 2000 → 10 Nov 2000 |