Novel 3D SEM Moiré method for micro height measurement

Chuanwei Li; Zhanwei Liu; Huimin Xie; Dan Wu

doi:10.1364/OE.21.015734

Novel 3D SEM Moiré method for micro height measurement

Chuanwei Li, Zhanwei Liu, Huimin Xie, Dan Wu

School of Aerospace Engineering

Tsinghua University

Research output: Contribution to journal › Article › peer-review

37 Citations (Scopus)

Abstract

A 3D SEM Moiré Method (SMM) is proposed in this investigation for the first time for 3D shape measurement with nano-scale sensitivity. The geometric model of the 3D SMM has been theoretically established, combining the stereovision technology in an SEM with the existing principles of in-plane SMM. The Virtual Projection Fringe (VPF) generated under different conditions has been analyzed for 3D reconstructions. Two typical applications have been used to experimentally validate the theoretical model. Experimental results, with the height measurement sensitivity less than 10nm, agree well with the theoretical model we proposed. The uncertainty analysis for the method has also been performed by other auxiliary measurements.

Original language	English
Pages (from-to)	15734-15746
Number of pages	13
Journal	Optics Express
Volume	21
Issue number	13
DOIs	https://doi.org/10.1364/OE.21.015734
Publication status	Published - 1 Jul 2013

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abstract = "A 3D SEM Moir{\'e} Method (SMM) is proposed in this investigation for the first time for 3D shape measurement with nano-scale sensitivity. The geometric model of the 3D SMM has been theoretically established, combining the stereovision technology in an SEM with the existing principles of in-plane SMM. The Virtual Projection Fringe (VPF) generated under different conditions has been analyzed for 3D reconstructions. Two typical applications have been used to experimentally validate the theoretical model. Experimental results, with the height measurement sensitivity less than 10nm, agree well with the theoretical model we proposed. The uncertainty analysis for the method has also been performed by other auxiliary measurements.",

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AU - Xie, Huimin

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N2 - A 3D SEM Moiré Method (SMM) is proposed in this investigation for the first time for 3D shape measurement with nano-scale sensitivity. The geometric model of the 3D SMM has been theoretically established, combining the stereovision technology in an SEM with the existing principles of in-plane SMM. The Virtual Projection Fringe (VPF) generated under different conditions has been analyzed for 3D reconstructions. Two typical applications have been used to experimentally validate the theoretical model. Experimental results, with the height measurement sensitivity less than 10nm, agree well with the theoretical model we proposed. The uncertainty analysis for the method has also been performed by other auxiliary measurements.

AB - A 3D SEM Moiré Method (SMM) is proposed in this investigation for the first time for 3D shape measurement with nano-scale sensitivity. The geometric model of the 3D SMM has been theoretically established, combining the stereovision technology in an SEM with the existing principles of in-plane SMM. The Virtual Projection Fringe (VPF) generated under different conditions has been analyzed for 3D reconstructions. Two typical applications have been used to experimentally validate the theoretical model. Experimental results, with the height measurement sensitivity less than 10nm, agree well with the theoretical model we proposed. The uncertainty analysis for the method has also been performed by other auxiliary measurements.

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Novel 3D SEM Moiré method for micro height measurement

Abstract

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