Non-null compensator design method in digital Moiré interferometry for freeform surface measurement

Qun Hao, Shaopu Wang, Yao Hu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Citations (Scopus)

Abstract

High accuracy interferometric testing for freeform optics surface has always been a great challenge because of its arbitrary form. Our group proposed a Digital Moiré Interferometric Technique (DMIT) based on partial compensator (PC) for aspheric surface testing since the year 2003. But the PC design method for non-rotational symmetric freeform surface is still a challenge. In this paper, we propose a PC design method for non-null freeform surface measurement. The PC generates non-rotational symmetry aberration by off axis and rotation round axis. Later the design criterion of PC is also analyzed. Finally an off-Axis aspheric surface was measured in the simulation experiment, and the error of PV and RMS is 0.0053λ and 0.0498λ theoretically. Experimental results indicate that the designed PC is able to be utilized in freeform surface measurement.

Original languageEnglish
Title of host publication8th International Symposium on Advanced Optical Manufacturing and Testing Technology
Subtitle of host publicationOptical Test, Measurement Technology, and Equipment
EditorsSandy To, Yudong Zhang, Ming Xu, Fan Wu
PublisherSPIE
ISBN (Electronic)9781628419191
DOIs
Publication statusPublished - 2016
Event8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment, AOMATT 2016 - Suzhou, China
Duration: 26 Apr 201629 Apr 2016

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9684
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment, AOMATT 2016
Country/TerritoryChina
CitySuzhou
Period26/04/1629/04/16

Keywords

  • Digital Moiré Interferometry
  • Partial Compensation Lens
  • Residual Wavefront Aberration
  • Wavefront Slope

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