NbF5前驱体化学气相沉积铌涂层的生长动力学

Mingmin Zheng; Chengwen Tan; Xiaodong Yu; Ying Li; Honglei Ma

NbF₅前驱体化学气相沉积铌涂层的生长动力学

Translated title of the contribution: Growth Kinetics of Niobium Coating Prepared by CVD from NbF₅

Mingmin Zheng, Chengwen Tan, Xiaodong Yu^*, Ying Li, Honglei Ma

^*Corresponding author for this work

School of Material Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Dense niobium coating was prepared by atmospheric pressure chemical vapor deposition (CVD) at 1150℃, and the deposition rate reached 250 μm/h. The post-deposition coating thickness was analyzed along the gas flow direction, and the mole percentage of NbF₅, H₂, HF and Ar at different positions were determined. Finally we obtained a growth kinetics equation by data fitting, which agrees well with the experimental results. Further analysis of the kinetic equations reveals that the byproduct HF has a great impact on deposition rate while Ar almost has no effect.

Translated title of the contribution	Growth Kinetics of Niobium Coating Prepared by CVD from NbF₅
Original language	Chinese (Traditional)
Pages (from-to)	187-190
Number of pages	4
Journal	Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Volume	47
Issue number	1
Publication status	Published - 1 Jan 2018

Cite this

@article{accb0c918d454527a56b7366f205f926,

title = "NbF5前驱体化学气相沉积铌涂层的生长动力学",

abstract = "Dense niobium coating was prepared by atmospheric pressure chemical vapor deposition (CVD) at 1150℃, and the deposition rate reached 250 μm/h. The post-deposition coating thickness was analyzed along the gas flow direction, and the mole percentage of NbF5, H2, HF and Ar at different positions were determined. Finally we obtained a growth kinetics equation by data fitting, which agrees well with the experimental results. Further analysis of the kinetic equations reveals that the byproduct HF has a great impact on deposition rate while Ar almost has no effect.",

keywords = "Byproducts, Chemical vapor deposition, Growth kinetics, Niobium coating",

author = "Mingmin Zheng and Chengwen Tan and Xiaodong Yu and Ying Li and Honglei Ma",

year = "2018",

month = jan,

day = "1",

language = "繁体中文",

volume = "47",

pages = "187--190",

journal = "Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering",

issn = "1002-185X",

publisher = "Science China Press",

number = "1",

}

TY - JOUR

T1 - NbF5前驱体化学气相沉积铌涂层的生长动力学

AU - Zheng, Mingmin

AU - Tan, Chengwen

AU - Yu, Xiaodong

AU - Li, Ying

AU - Ma, Honglei

PY - 2018/1/1

Y1 - 2018/1/1

N2 - Dense niobium coating was prepared by atmospheric pressure chemical vapor deposition (CVD) at 1150℃, and the deposition rate reached 250 μm/h. The post-deposition coating thickness was analyzed along the gas flow direction, and the mole percentage of NbF5, H2, HF and Ar at different positions were determined. Finally we obtained a growth kinetics equation by data fitting, which agrees well with the experimental results. Further analysis of the kinetic equations reveals that the byproduct HF has a great impact on deposition rate while Ar almost has no effect.

AB - Dense niobium coating was prepared by atmospheric pressure chemical vapor deposition (CVD) at 1150℃, and the deposition rate reached 250 μm/h. The post-deposition coating thickness was analyzed along the gas flow direction, and the mole percentage of NbF5, H2, HF and Ar at different positions were determined. Finally we obtained a growth kinetics equation by data fitting, which agrees well with the experimental results. Further analysis of the kinetic equations reveals that the byproduct HF has a great impact on deposition rate while Ar almost has no effect.

KW - Byproducts

KW - Chemical vapor deposition

KW - Growth kinetics

KW - Niobium coating

UR - http://www.scopus.com/inward/record.url?scp=85052691785&partnerID=8YFLogxK

M3 - 文章

AN - SCOPUS:85052691785

SN - 1002-185X

VL - 47

SP - 187

EP - 190

JO - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

JF - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

IS - 1

ER -

NbF₅前驱体化学气相沉积铌涂层的生长动力学

Abstract

Other files and links

Fingerprint

Cite this