Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

Weiyi Ma; Yi Jiang; Han Zhang; Liuchao Zhang; Jie Hu; Lan Jiang

doi:10.1515/ntrev-2019-0028

Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

Weiyi Ma, Yi Jiang^*, Han Zhang, Liuchao Zhang, Jie Hu, Lan Jiang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

An on-fiber extrinsic Fabry-Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.

Original language	English
Pages (from-to)	293-298
Number of pages	6
Journal	Nanotechnology Reviews
Volume	8
Issue number	1
DOIs	https://doi.org/10.1515/ntrev-2019-0028
Publication status	Published - 1 Jan 2019

Keywords

Extrinsic Fabry-Perot interferometer
femtosecond laser micromachining
fiber optical sensor
vibration sensor

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10.1515/ntrev-2019-0028

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Ma, W., Jiang, Y., Zhang, H., Zhang, L., Hu, J., & Jiang, L. (2019). Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam. Nanotechnology Reviews, 8(1), 293-298. https://doi.org/10.1515/ntrev-2019-0028

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abstract = "An on-fiber extrinsic Fabry-Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.",

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AU - Jiang, Lan

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Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

Abstract

Keywords

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