Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

Weiyi Ma; Yi Jiang; Han Zhang; Liuchao Zhang; Jie Hu; Lan Jiang

doi:10.1515/ntrev-2019-0028

Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

Weiyi Ma, Yi Jiang^*, Han Zhang, Liuchao Zhang, Jie Hu, Lan Jiang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

An on-fiber extrinsic Fabry-Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.

Original language	English
Pages (from-to)	293-298
Number of pages	6
Journal	Nanotechnology Reviews
Volume	8
Issue number	1
DOIs	https://doi.org/10.1515/ntrev-2019-0028
Publication status	Published - 1 Jan 2019

Keywords

Extrinsic Fabry-Perot interferometer
femtosecond laser micromachining
fiber optical sensor
vibration sensor

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10.1515/ntrev-2019-0028

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@article{aea6874138804743895cf1d492c78cb4,

title = "Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam",

abstract = "An on-fiber extrinsic Fabry-Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.",

keywords = "Extrinsic Fabry-Perot interferometer, femtosecond laser micromachining, fiber optical sensor, vibration sensor",

author = "Weiyi Ma and Yi Jiang and Han Zhang and Liuchao Zhang and Jie Hu and Lan Jiang",

note = "Publisher Copyright: {\textcopyright} 2019 W. Ma et al., published by De Gruyter 2019.",

year = "2019",

month = jan,

day = "1",

doi = "10.1515/ntrev-2019-0028",

language = "English",

volume = "8",

pages = "293--298",

journal = "Nanotechnology Reviews",

issn = "2191-9089",

publisher = "Walter de Gruyter GmbH",

number = "1",

}

TY - JOUR

T1 - Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

AU - Ma, Weiyi

AU - Jiang, Yi

AU - Zhang, Han

AU - Zhang, Liuchao

AU - Hu, Jie

AU - Jiang, Lan

PY - 2019/1/1

Y1 - 2019/1/1

N2 - An on-fiber extrinsic Fabry-Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.

AB - An on-fiber extrinsic Fabry-Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.

KW - Extrinsic Fabry-Perot interferometer

KW - femtosecond laser micromachining

KW - fiber optical sensor

KW - vibration sensor

UR - http://www.scopus.com/inward/record.url?scp=85076181987&partnerID=8YFLogxK

U2 - 10.1515/ntrev-2019-0028

DO - 10.1515/ntrev-2019-0028

M3 - Article

AN - SCOPUS:85076181987

SN - 2191-9089

VL - 8

SP - 293

EP - 298

JO - Nanotechnology Reviews

JF - Nanotechnology Reviews

IS - 1

ER -

Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

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Keywords

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