Abstract
Using the technique of capacitance micrometry it is possible to measure very small displacements. Here, a microcomputer-controlled scanning Fabry-Perot interferometer is presented. In each scanning step, the parallelism of Fabry-Perot interferometer is monitored and adjusted in real-time with the aid of three capacitance micrometers - it is the feature of this system, where the readjustment and scanning are realized with three electrostrictive actuators, and the parallelism and the spacing of the mirrors are controlled by three capacitance micrometers. The light information from the interferometer is detected by a photo-detector. All of these are controlled by a microcomputer in order to realize the scanning and real-time control of Fabry-Perot interferometer. This system removes the problem of the nonlinear response and hysteresis associated with electrostrictive actuators and allows precise control of both parallelism and spacing of the mirrors.
| Original language | English |
|---|---|
| Pages (from-to) | 515-522 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3786 |
| Publication status | Published - 1999 |
| Event | Proceedings of the 1999 Optomechanical Engineering and Vibration Control - Denver, CO, USA Duration: 20 Jul 1999 → 23 Jul 1999 |