@inproceedings{7c6be327a4434987b9c1a99e9bff2c2c,
title = "Laser direct writing graphene patterns on SiO2/Si substrates",
abstract = "Direct fabrication of graphene patterns on SiO2/Si substrates was demonstrated using a single-step laser-induced chemical vapor deposition (LCVD) process. A laser beam was used to irradiate a nickel-coated SiO 2/Si substrate in a methane-hydrogen environment to induce a local temperature rise on the laser focused area. Followed by a rapid cooling process by moving the laser beam, graphene patterns were formed on the laser scanning pathway. Nickel (Ni) layer under graphene patterns was removed by the Ni etchant diffused into the area under the graphene. Laser direct writing graphene patterns on SiO2/Si substrates was achieved. Energy dispersive X-ray diffraction spectroscopy was used to confirm the removal of Ni layers. The discovery and development of the LCVD growth process provide a route for the rapid fabrication of graphene-based electronic devices.",
keywords = "Graphene patterns, Laser direct writing, Laser-induced chemical vapor deposition",
author = "Lisha Fan and Wei Xiong and Yang Gao and Jongbok Park and Yunshen Zhou and Lan Jiang and Yongfeng Lu",
year = "2013",
doi = "10.1117/12.2001405",
language = "English",
isbn = "9780819493774",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Laser-Based Micro- and Nanopackaging and Assembly VII",
note = "Laser-Based Micro- and Nanopackaging and Assembly VII, LBMP 2013 ; Conference date: 06-02-2013 Through 07-02-2013",
}