Laser differential confocal radius measurement

Weiqian Zhao*, Ruoduan Sun, Lirong Qiu, Dingguo Sha

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

79 Citations (Scopus)

Abstract

A new laser differential confocal radius measurement (DCRM) is proposed for high precision measurement of radius. Based on the property of an axial intensity curve that the absolute zero precisely corresponds to the focus of the objective in a differential confocal system (DCS), DCRM uses the zero point of the DCS axial intensity curve to precisely identify the cat'seye and confocal positions of the test lens, and measures the accurate distance between the two positions to achieve the high-precision measurement of radius of curvature (ROC). In comparison with the existing measurement methods, DCRM proposed has a high measurement precision, a strong environmental anti-interference capability and a low cost. The theoretical analyses and preliminary experimental results indicate that DCRM has a relative measurement error of better than 5ppm.

Original languageEnglish
Pages (from-to)2345-2360
Number of pages16
JournalOptics Express
Volume18
Issue number3
DOIs
Publication statusPublished - 1 Feb 2010

Fingerprint

Dive into the research topics of 'Laser differential confocal radius measurement'. Together they form a unique fingerprint.

Cite this