Laser differential confocal curvature measurement system with grating length

Peng Xu, Weiqian Zhao*, Fangbiao Wang, Yang Xiao, Taogeng Zhou

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

In order to enhance the environmental anti-interference capability for the radius of curvature (ROC) measurement and meet the requirements of use on the production spot, a laser differential confocal curvature measurement system with grating was developed, which used the property, that the zero point of a differential confocal intensity curve corresponds to the focus of objective, to precisely identify the cat-eye and confocal positions of the tested lens, and then used the grating to measure the distance between these two positions, thereby the high-precision measurement of ROC was achieved. Experimental results show that the system has an accuracy of better than 5×10-6. So it can meet the demand of high-precision measurement of ROC.

Original languageEnglish
Pages (from-to)1023-1028
Number of pages6
JournalJournal of Applied Optics
Volume35
Issue number6
DOIs
Publication statusPublished - 1 Nov 2014

Keywords

  • Curvature radius measurement
  • Differential confocal
  • Grating
  • Non-contact measurement

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