TY - JOUR
T1 - Laser differential confocal curvature measurement system with grating length
AU - Xu, Peng
AU - Zhao, Weiqian
AU - Wang, Fangbiao
AU - Xiao, Yang
AU - Zhou, Taogeng
N1 - Publisher Copyright:
©, 2014, The No.205 Research Institute of China Ordnance Industry. All right reserved.
PY - 2014/11/1
Y1 - 2014/11/1
N2 - In order to enhance the environmental anti-interference capability for the radius of curvature (ROC) measurement and meet the requirements of use on the production spot, a laser differential confocal curvature measurement system with grating was developed, which used the property, that the zero point of a differential confocal intensity curve corresponds to the focus of objective, to precisely identify the cat-eye and confocal positions of the tested lens, and then used the grating to measure the distance between these two positions, thereby the high-precision measurement of ROC was achieved. Experimental results show that the system has an accuracy of better than 5×10-6. So it can meet the demand of high-precision measurement of ROC.
AB - In order to enhance the environmental anti-interference capability for the radius of curvature (ROC) measurement and meet the requirements of use on the production spot, a laser differential confocal curvature measurement system with grating was developed, which used the property, that the zero point of a differential confocal intensity curve corresponds to the focus of objective, to precisely identify the cat-eye and confocal positions of the tested lens, and then used the grating to measure the distance between these two positions, thereby the high-precision measurement of ROC was achieved. Experimental results show that the system has an accuracy of better than 5×10-6. So it can meet the demand of high-precision measurement of ROC.
KW - Curvature radius measurement
KW - Differential confocal
KW - Grating
KW - Non-contact measurement
UR - http://www.scopus.com/inward/record.url?scp=84916597353&partnerID=8YFLogxK
U2 - 10.5768/JAO201435.0603002
DO - 10.5768/JAO201435.0603002
M3 - Article
AN - SCOPUS:84916597353
SN - 1002-2082
VL - 35
SP - 1023
EP - 1028
JO - Journal of Applied Optics
JF - Journal of Applied Optics
IS - 6
ER -