Laser Confocal Interference Multi-Parameter Measurement Method for Spherical Lens

Lirong Qiu; Yang Xiao; Weiqian Zhao; Yun Wang

doi:10.1109/LPT.2016.2615422

Laser Confocal Interference Multi-Parameter Measurement Method for Spherical Lens

Lirong Qiu, Yang Xiao, Weiqian Zhao^*, Yun Wang

^*Corresponding author for this work

School of Optics and Photonics

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

This letter proposes a new, comprehensive laser confocal interference multi-parameter measurement method (CIMPM) to improve the measurement accuracy and efficiency for the multiple parameters of a spherical lens. By integrating laser confocal and sphere interference measurement techniques, the proposed CIMPM uses the laser confocal focusing technique to measure the radius, thickness, and refractivity of a spherical lens, and uses laser interference measurement technique to measure the surface figure. So, this technique achieves high accuracy comprehensive multi-parameter measurements of a spherical lens on a single instrument. Experiments indicate that the proposed CIMPM can achieve a measurement accuracy of 9 ppm for the radius, 3.2.×10^-4 for the thickness, 1.6.×10^-4 for the refractivity, and a peak to valley of λ/20 for the surface figure.

Original language	English
Pages (from-to)	2716-2719
Number of pages	4
Journal	IEEE Photonics Technology Letters
Volume	28
Issue number	23
DOIs	https://doi.org/10.1109/LPT.2016.2615422
Publication status	Published - 1 Dec 2016

Keywords

Confocal interference
figure measurement
multi-parameter measurement
spherical lens

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10.1109/LPT.2016.2615422

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title = "Laser Confocal Interference Multi-Parameter Measurement Method for Spherical Lens",

abstract = "This letter proposes a new, comprehensive laser confocal interference multi-parameter measurement method (CIMPM) to improve the measurement accuracy and efficiency for the multiple parameters of a spherical lens. By integrating laser confocal and sphere interference measurement techniques, the proposed CIMPM uses the laser confocal focusing technique to measure the radius, thickness, and refractivity of a spherical lens, and uses laser interference measurement technique to measure the surface figure. So, this technique achieves high accuracy comprehensive multi-parameter measurements of a spherical lens on a single instrument. Experiments indicate that the proposed CIMPM can achieve a measurement accuracy of 9 ppm for the radius, 3.2.×10-4 for the thickness, 1.6.×10-4 for the refractivity, and a peak to valley of λ/20 for the surface figure.",

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AU - Qiu, Lirong

AU - Xiao, Yang

AU - Zhao, Weiqian

AU - Wang, Yun

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N2 - This letter proposes a new, comprehensive laser confocal interference multi-parameter measurement method (CIMPM) to improve the measurement accuracy and efficiency for the multiple parameters of a spherical lens. By integrating laser confocal and sphere interference measurement techniques, the proposed CIMPM uses the laser confocal focusing technique to measure the radius, thickness, and refractivity of a spherical lens, and uses laser interference measurement technique to measure the surface figure. So, this technique achieves high accuracy comprehensive multi-parameter measurements of a spherical lens on a single instrument. Experiments indicate that the proposed CIMPM can achieve a measurement accuracy of 9 ppm for the radius, 3.2.×10-4 for the thickness, 1.6.×10-4 for the refractivity, and a peak to valley of λ/20 for the surface figure.

AB - This letter proposes a new, comprehensive laser confocal interference multi-parameter measurement method (CIMPM) to improve the measurement accuracy and efficiency for the multiple parameters of a spherical lens. By integrating laser confocal and sphere interference measurement techniques, the proposed CIMPM uses the laser confocal focusing technique to measure the radius, thickness, and refractivity of a spherical lens, and uses laser interference measurement technique to measure the surface figure. So, this technique achieves high accuracy comprehensive multi-parameter measurements of a spherical lens on a single instrument. Experiments indicate that the proposed CIMPM can achieve a measurement accuracy of 9 ppm for the radius, 3.2.×10-4 for the thickness, 1.6.×10-4 for the refractivity, and a peak to valley of λ/20 for the surface figure.

KW - Confocal interference

KW - figure measurement

KW - multi-parameter measurement

KW - spherical lens

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JF - IEEE Photonics Technology Letters

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Laser Confocal Interference Multi-Parameter Measurement Method for Spherical Lens

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Keywords

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