Laser beam collimation method and technology in given beam direction

In this method, displacement and angle excursions of laser beam from given direction was measured and controlled dynamically in real time through micro-angle measuring and micro-angle controlling systems based on piezoelectric driving, in the collimation system, displacement excursion and angle excursions of laser beam is measured separately and each of them has a independent feedback control system to restrain the excursion respectively, so the coupling in feedback control between displacement excursion and angle excursion is decreased so the collimation precision and collimation efficiency are improved. Experiments prove that the collimation precision of laser beam can reach 5×10^-8 rad.