High-Quality Micropattern Printing by Complex-Amplitude Modulation Holographic Femtosecond Laser

Taoyong Li, Lan Jiang, Zhipeng Wang, Peng Yi, Min Li, Leyi Zhang, Xibiao Li, Luqi Li, Lingling Huang, Zhi Wang, Xiangyu Zhang, Andong Wang, Jiafang Li, Xiaowei Li*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Holographic femtosecond laser printing technology is widely used in the fabrication of micropatterns because of its high efficiency and flexibility. However, speckle noise and energy fluctuations limit the quality of the printed structure. In this study, an improved complex-amplitude modulation holographic femtosecond laser printing method for high-quality micropattern fabrication is proposed. The holographic light field is divided into a signal area and a surrounding noise area. To improve laser uniformity, phase modulation is applied in the signal region to eliminate the speckle noise caused by unconstrained phase interference, and weighted amplitude modulation is introduced in the signal area to improve the calculation accuracy. To precisely control laser energy density, weighted energy efficiency modulation is introduced in the noise region to disperse the energy that exceeds the material damage threshold. Under the synergistic control of laser uniformity and energy density, high-quality micro-pattern structures are printed efficiently. A high-quality millimeter-sized multifocal zone plate with micron accuracy is fabricated with the splicing printing method, demonstrating the potential of micropattern processing and the fabrication of functional devices such as binary optics.

Original languageEnglish
Article number2400804
JournalAdvanced Optical Materials
Volume12
Issue number23
DOIs
Publication statusPublished - 14 Aug 2024

Keywords

  • amplitude and phase constraint
  • binary optics
  • complex amplitude modulation
  • femtosecond laser printing
  • holographic laser

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Li, T., Jiang, L., Wang, Z., Yi, P., Li, M., Zhang, L., Li, X., Li, L., Huang, L., Wang, Z., Zhang, X., Wang, A., Li, J., & Li, X. (2024). High-Quality Micropattern Printing by Complex-Amplitude Modulation Holographic Femtosecond Laser. Advanced Optical Materials, 12(23), Article 2400804. https://doi.org/10.1002/adom.202400804