TY - GEN
T1 - High Precision Machining of Micro-pyramid Array of Electroless Ni-P Plating Based on Relative Tool Sharpness Effect
AU - Yu, Qian
AU - Zhou, Tianfeng
AU - Hu, Yao
AU - Zhou, Jia
AU - Yao, Xiaoqiang
AU - Zhang, Danmei
AU - Hao, Qun
AU - Wang, Xibin
N1 - Publisher Copyright:
© 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.
PY - 2022
Y1 - 2022
N2 - Relative tool sharpness (RTS) is identified as the ratio of undeformed chip thickness to tool cutting edge radius, which plays an important role in affecting the micro- or nano-machining process. This paper studied the effect of RTS on the high precision micro-pyramid array machining of electroless Ni-P plating. A V-shaped diamond tool was adopted, the cutting edge radius of which was measured by a laser scanning confocal microscope (LSCM). The effects of cutting speed and RTS on the machining process were investigated by finite element simulation. A multi-step cutting method was applied for the machining of the micro-pyramid array. Results showed that the optimal machined surface roughness is obtained at a cutting speed of 60 m/min and an RTS of 0.4. Compared with the theoretical profile, the relative errors of the pitch, depth, and included angle of the micro-pyramid array can be controlled below 0.24%, 0.80%, and 2.50%, respectively. The PV value of the machined micro-pyramid array is under 200 nm.
AB - Relative tool sharpness (RTS) is identified as the ratio of undeformed chip thickness to tool cutting edge radius, which plays an important role in affecting the micro- or nano-machining process. This paper studied the effect of RTS on the high precision micro-pyramid array machining of electroless Ni-P plating. A V-shaped diamond tool was adopted, the cutting edge radius of which was measured by a laser scanning confocal microscope (LSCM). The effects of cutting speed and RTS on the machining process were investigated by finite element simulation. A multi-step cutting method was applied for the machining of the micro-pyramid array. Results showed that the optimal machined surface roughness is obtained at a cutting speed of 60 m/min and an RTS of 0.4. Compared with the theoretical profile, the relative errors of the pitch, depth, and included angle of the micro-pyramid array can be controlled below 0.24%, 0.80%, and 2.50%, respectively. The PV value of the machined micro-pyramid array is under 200 nm.
KW - Electroless Ni-P plating
KW - Micro-pyramid array
KW - Relative tool sharpness
UR - http://www.scopus.com/inward/record.url?scp=85128930755&partnerID=8YFLogxK
U2 - 10.1007/978-981-19-1918-3_4
DO - 10.1007/978-981-19-1918-3_4
M3 - Conference contribution
AN - SCOPUS:85128930755
SN - 9789811919176
T3 - Smart Innovation, Systems and Technologies
SP - 27
EP - 32
BT - Proceedings of the 7th International Conference on Nanomanufacturing, nanoMan2021
A2 - Yang, Shuming
A2 - Luo, Xichun
A2 - Yan, Yongda
A2 - Jiang, Zhuangde
PB - Springer Science and Business Media Deutschland GmbH
T2 - 7th International Conference on Nanomanufacturing, nanoMan2021
Y2 - 17 November 2021 through 19 November 2021
ER -