@inproceedings{b5f6fbfefa5b422e8b7c4c35a884cf4d,
title = "High-frequency angular vibration calibration using the mirror assembly diffraction grating heterodyne laser interferometer",
abstract = "In order to improve the dynamic evaluating capabilities of the inertial devices and realize the traceability in angular vibration, the angular vibration calibration devices are developed and it is very important to measure the angular vibration accurately for calibration devices. In this paper, a new diffraction grating heterodyne laser interferometer method was introduced for high-frequency and micro-amplitude angular-vibration measurement, which uses a differential and symmetrical optical-path arrangement. The proposed method has the advantages of high-precision, high anti-interference and convenient debugging, and could achieve the angular measurement resolution within 0.02″.",
keywords = "Angular vibration, Diffraction grating, Heterodyne interferometer, High-frequency, Micro-amplitude",
author = "Jingfeng Xue and Dazhi Zhang and Xinliang Li and Weiqian Zhao",
note = "Publisher Copyright: {\textcopyright} 2014 SPIE.; 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, AOMATT 2014 ; Conference date: 26-04-2014 Through 29-04-2014",
year = "2014",
doi = "10.1117/12.2067780",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yudong Zhang and Wei Gao",
booktitle = "7th International Symposium on Advanced Optical Manufacturing and Testing Technologies",
address = "United States",
}