Heteroepitaxy of semiconducting 2H-MoTe2 thin films on arbitrary surfaces for large-scale heterogeneous integration

Yu Pan, Roger Guzman, Siheng Li, Wanjin Xu, Yanping Li, Ning Tang, Huaxiang Yin, Jun He, Aimin Wu, Ji Chen*, Wu Zhou*, Xiaolong Xu*, Yu Ye*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)

Abstract

The integration of two-dimensional semiconductors and arbitrary materials or architectures offers the possibility to enhance the functionality of a material and improve device performance. However, the traditional vertical epitaxy process requires a lattice-matched planar substrate, which limits the scope of heterogeneous integration. Bottom-up heteroepitaxial growth of single-crystal thin films on arbitrary materials with a large lattice mismatch typically results in highly defective interfaces. Here we report a general synthesis route for heteroepitaxial growth of semiconducting 2H-MoTe2 films on arbitrary substrates with different crystal symmetries, lattice constants and three-dimensional architectures, which overcomes the limitation of the substrate. The in-plane two-dimensional epitaxy process through phase transition enables the direct synthesis of single-crystal semiconducting 2H-MoTe2 films on arbitrary single-crystal substrates (including silicon, GaN, 4H-SiC, sapphire, SrTiO3 and Gd3Ga5O12) and three-dimensional architectures without the limitation of lattice matching and a planar surface. This heteroepitaxial method provides a way of heterogeneous integration of semiconducting 2H-MoTe2 films with other functional materials or architectures for the fabrication of integrated devices. [Figure not available: see fulltext.]

Original languageEnglish
Pages (from-to)701-708
Number of pages8
JournalNature Synthesis
Volume1
Issue number9
DOIs
Publication statusPublished - Sept 2022
Externally publishedYes

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Pan, Y., Guzman, R., Li, S., Xu, W., Li, Y., Tang, N., Yin, H., He, J., Wu, A., Chen, J., Zhou, W., Xu, X., & Ye, Y. (2022). Heteroepitaxy of semiconducting 2H-MoTe2 thin films on arbitrary surfaces for large-scale heterogeneous integration. Nature Synthesis, 1(9), 701-708. https://doi.org/10.1038/s44160-022-00134-0