@inproceedings{9b86d854902b45c99bcb6c96fe016b2a,
title = "Freeform surface measurement with non-null interferometry",
abstract = "Freeform surfaces have drawn intensive attention in optical imaging and illumination field because of its great flexibility in optical design. However, the fabrication and testing of freeform surfaces remain a great challenge due to the arbitrary shape. Interferometry is among the high-accuracy testing method of optical surfaces. How to generate a non-rotationallysymmetric wavefront similar with the surface under test and retrieve the phase from dense interferogram are hotspot issues. In this paper, we introduce two key technologies in non-null interferometry to solve the above-mentioned problems. The first is the design method of an off-axis catadioptric non-null compensator including a deformable mirror. The second is phase retrieval of single dense interferogram with digital moir{\'e} phase shifting interferogram and wavelet analysis. Simulations demonstrate the feasibility of the proposed method.",
keywords = "Deformable mirror, Freeform surface, Interferometry, Wavelet analysis",
author = "Qun Hao and Yao Hu and Xu Chang and Ting Zhou",
note = "Publisher Copyright: {\textcopyright} 2020 SPIE.; Optical Design and Testing X 2020 ; Conference date: 11-10-2020 Through 16-10-2020",
year = "2020",
doi = "10.1117/12.2573384",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yongtian Wang and Kidger, {Tina E.} and Osamu Matoba and Rengmao Wu",
booktitle = "Optical Design and Testing X",
address = "United States",
}