Femtosecond laser induced concentric semi-circular periodic surface structures on silicon based on the quasi-plasmonic annular nanostructure

In this study, we report polarization-dependent concentric circular periodic surface structures on Si induced by a single shot femtosecond (fs) laser pulse based on pre-processed quasi-plasmonic annular-shaped nanostructure. An abnormal annular-shaped energy deposition of the fundamental fs laser pulse can be found by using dual-wavelength superposition of the fundamental frequency (ω) and the second-harmonic frequency (2ω) of an fs Ti:sapphire laser, which is confirmed by real beam shape detection. Based on the annular-shaped energy distribution of dual-wavelength fs laser, a concentric quasi-plasmonic corral nanostructure can be imprinted on the Au thin film. Surface plasmon polaritons (SPPs) excitations on the planar metallic nanostructures enable the manipulation of light on subwavelength scales. Thus, the pre-processed concentric quasi-plasmonic corral nanostructure can act as a precursor for the subsequent SPPs excitation and propagation by the fs laser irradiation. Using this technique, polarization-dependent semi-circular periodic surface structures on silicon can be found by the irradiation of fs laser pulse with only one shot. This research provides an additional freedom for the laser induced periodic surface structure (LIPSS) modulation based on the modulation of SPPs excitation and propagation, which plays an important role in the formation of LIPSS.