Error analysis for a laser differential confocal radius measurement system

Xu Wang; Lirong Qiu; Weiqian Zhao; Yang Xiao; Zhongyu Wang

doi:10.1364/AO.54.001078

Error analysis for a laser differential confocal radius measurement system

Xu Wang, Lirong Qiu, Weiqian Zhao^*, Yang Xiao, Zhongyu Wang

^*Corresponding author for this work

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

In order to further improve the measurement accuracy of the laser differential confocal radius measurement system (DCRMS) developed previously, a DCRMS error compensation model is established for the error sources, including laser source offset, test sphere position adjustment offset, test sphere figure, and motion error, based on analyzing the influences of these errors on the measurement accuracy of radius of curvature. Theoretical analyses and experiments indicate that the expanded uncertainty of the DCRMS is reduced to U = 0.13 μm + 0.9 ppm · R (κ = 2) through the error compensation model. The error analysis and compensation model established in this study can provide the theoretical foundation for improving the measurement accuracy of the DCRMS.

Original language	English
Pages (from-to)	1078-1084
Number of pages	7
Journal	Applied Optics
Volume	54
Issue number	5
DOIs	https://doi.org/10.1364/AO.54.001078
Publication status	Published - 10 Feb 2015

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title = "Error analysis for a laser differential confocal radius measurement system",

abstract = "In order to further improve the measurement accuracy of the laser differential confocal radius measurement system (DCRMS) developed previously, a DCRMS error compensation model is established for the error sources, including laser source offset, test sphere position adjustment offset, test sphere figure, and motion error, based on analyzing the influences of these errors on the measurement accuracy of radius of curvature. Theoretical analyses and experiments indicate that the expanded uncertainty of the DCRMS is reduced to U = 0.13 μm + 0.9 ppm · R (κ = 2) through the error compensation model. The error analysis and compensation model established in this study can provide the theoretical foundation for improving the measurement accuracy of the DCRMS.",

author = "Xu Wang and Lirong Qiu and Weiqian Zhao and Yang Xiao and Zhongyu Wang",

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AU - Wang, Xu

AU - Qiu, Lirong

AU - Zhao, Weiqian

AU - Xiao, Yang

AU - Wang, Zhongyu

PY - 2015/2/10

Y1 - 2015/2/10

N2 - In order to further improve the measurement accuracy of the laser differential confocal radius measurement system (DCRMS) developed previously, a DCRMS error compensation model is established for the error sources, including laser source offset, test sphere position adjustment offset, test sphere figure, and motion error, based on analyzing the influences of these errors on the measurement accuracy of radius of curvature. Theoretical analyses and experiments indicate that the expanded uncertainty of the DCRMS is reduced to U = 0.13 μm + 0.9 ppm · R (κ = 2) through the error compensation model. The error analysis and compensation model established in this study can provide the theoretical foundation for improving the measurement accuracy of the DCRMS.

AB - In order to further improve the measurement accuracy of the laser differential confocal radius measurement system (DCRMS) developed previously, a DCRMS error compensation model is established for the error sources, including laser source offset, test sphere position adjustment offset, test sphere figure, and motion error, based on analyzing the influences of these errors on the measurement accuracy of radius of curvature. Theoretical analyses and experiments indicate that the expanded uncertainty of the DCRMS is reduced to U = 0.13 μm + 0.9 ppm · R (κ = 2) through the error compensation model. The error analysis and compensation model established in this study can provide the theoretical foundation for improving the measurement accuracy of the DCRMS.

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Error analysis for a laser differential confocal radius measurement system

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