Analysis of frequency spectrum of laser-induced vibration of microbeam resonators

Dai Ning Fang*, Yu Xin Sun, Ai Kah Soh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

33 Citations (Scopus)

Abstract

The vibration phenomenon during pulsed laser heating of micro-beams is investigated. The beam is made of silicon and is heated by a laser pulse with a non-Gaussian temporal profile and with an ultrashort pulse duration of 2ps, which incites vibration due to the thermoelastic damping effect. This coupled thermoelastic problem is solved using an analytical-numerical technique based on the Laplace transformation. The damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are also examined and discussed.

Original languageEnglish
Article number055
Pages (from-to)1554-1557
Number of pages4
JournalChinese Physics Letters
Volume23
Issue number6
DOIs
Publication statusPublished - 1 Jun 2006
Externally publishedYes

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