A competition between (0 0 1) and (0 1 1) alignments in yttria stabilized zirconia thin films fabricated by ion beam assisted deposition

Z. Wang*, B. J. Yan, F. Feng, H. Chen, K. Shi, Z. Han

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Biaxially textured yttria stabilized zirconia (YSZ) thin films, were deposited on glass substrates by ion beam assisted deposition method with different deposition time. As contrasts, films were also fabricated without assisting ion beam. The orientation properties of the films were characterized by X-ray diffraction. A comparative study shows that there is a competition between (0 0 1) and (0 1 1) alignments during the growth process. Assisting ions make the films (0 0 1)-advantaged and biaxially textured. The competitive growth and the orientation development are explained by selective resputtering and anisotropic damage on growing films induced by assisting ions.

Original languageEnglish
Pages (from-to)622-625
Number of pages4
JournalPhysica C: Superconductivity and its Applications
Volume470
Issue number15-16
DOIs
Publication statusPublished - 1 Aug 2010

Keywords

  • Alignment competition
  • Ion beam assisted deposition
  • Yttria stabilized zirconia

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