3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method

Huihui Wen; Hongye Zhang; Runlai Peng; Chao Liu; Shuman Liu; Fengqi Liu; Huimin Xie; Zhanwei Liu

doi:10.1002/smtd.202300107

3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method

Huihui Wen^*, Hongye Zhang^*, Runlai Peng, Chao Liu, Shuman Liu, Fengqi Liu, Huimin Xie^*, Zhanwei Liu^*

^*Corresponding author for this work

School of Aerospace Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The mechanical properties of micro- and nanoscale materials directly determine the reliability of heterostructures, microstructures, and microdevices. Therefore, an accurate evaluation of the 3D strain field at the nanoscale is important. In this study, a scanning transmission electron microscopy (STEM) moiré depth sectioning method is proposed. By optimizing the scanning parameters of electron probes at different depths of the material, the sequence STEM moiré fringes (STEM-MFs) with a large field of view, which can be hundreds of nanometers obtained. Then, the 3D STEM moiré information constructed. To some extent, multi-scale 3D strain field measurements from nanometer to the submicrometer scale actualized. The 3D strain field near the heterostructure interface and single dislocation accurately measured by the developed method.

Original language	English
Article number	2300107
Journal	Small Methods
Volume	7
Issue number	9
DOIs	https://doi.org/10.1002/smtd.202300107
Publication status	Published - 20 Sept 2023

Keywords

3D strain field
STEM-MF
depth sectioning
large field of view

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10.1002/smtd.202300107

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@article{d2ea81137092459a866c28fe4183bd54,

title = "3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moir{\'e} Depth Sectioning Method",

abstract = "The mechanical properties of micro- and nanoscale materials directly determine the reliability of heterostructures, microstructures, and microdevices. Therefore, an accurate evaluation of the 3D strain field at the nanoscale is important. In this study, a scanning transmission electron microscopy (STEM) moir{\'e} depth sectioning method is proposed. By optimizing the scanning parameters of electron probes at different depths of the material, the sequence STEM moir{\'e} fringes (STEM-MFs) with a large field of view, which can be hundreds of nanometers obtained. Then, the 3D STEM moir{\'e} information constructed. To some extent, multi-scale 3D strain field measurements from nanometer to the submicrometer scale actualized. The 3D strain field near the heterostructure interface and single dislocation accurately measured by the developed method.",

keywords = "3D strain field, STEM-MF, depth sectioning, large field of view",

author = "Huihui Wen and Hongye Zhang and Runlai Peng and Chao Liu and Shuman Liu and Fengqi Liu and Huimin Xie and Zhanwei Liu",

note = "Publisher Copyright: {\textcopyright} 2023 Wiley-VCH GmbH.",

year = "2023",

month = sep,

day = "20",

doi = "10.1002/smtd.202300107",

language = "English",

volume = "7",

journal = "Small Methods",

issn = "2366-9608",

publisher = "John Wiley and Sons Ltd",

number = "9",

}

TY - JOUR

T1 - 3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method

AU - Wen, Huihui

AU - Zhang, Hongye

AU - Peng, Runlai

AU - Liu, Chao

AU - Liu, Shuman

AU - Liu, Fengqi

AU - Xie, Huimin

AU - Liu, Zhanwei

PY - 2023/9/20

Y1 - 2023/9/20

N2 - The mechanical properties of micro- and nanoscale materials directly determine the reliability of heterostructures, microstructures, and microdevices. Therefore, an accurate evaluation of the 3D strain field at the nanoscale is important. In this study, a scanning transmission electron microscopy (STEM) moiré depth sectioning method is proposed. By optimizing the scanning parameters of electron probes at different depths of the material, the sequence STEM moiré fringes (STEM-MFs) with a large field of view, which can be hundreds of nanometers obtained. Then, the 3D STEM moiré information constructed. To some extent, multi-scale 3D strain field measurements from nanometer to the submicrometer scale actualized. The 3D strain field near the heterostructure interface and single dislocation accurately measured by the developed method.

AB - The mechanical properties of micro- and nanoscale materials directly determine the reliability of heterostructures, microstructures, and microdevices. Therefore, an accurate evaluation of the 3D strain field at the nanoscale is important. In this study, a scanning transmission electron microscopy (STEM) moiré depth sectioning method is proposed. By optimizing the scanning parameters of electron probes at different depths of the material, the sequence STEM moiré fringes (STEM-MFs) with a large field of view, which can be hundreds of nanometers obtained. Then, the 3D STEM moiré information constructed. To some extent, multi-scale 3D strain field measurements from nanometer to the submicrometer scale actualized. The 3D strain field near the heterostructure interface and single dislocation accurately measured by the developed method.

KW - 3D strain field

KW - STEM-MF

KW - depth sectioning

KW - large field of view

UR - http://www.scopus.com/inward/record.url?scp=85161469311&partnerID=8YFLogxK

U2 - 10.1002/smtd.202300107

DO - 10.1002/smtd.202300107

M3 - Article

C2 - 37300326

AN - SCOPUS:85161469311

SN - 2366-9608

VL - 7

JO - Small Methods

JF - Small Methods

IS - 9

M1 - 2300107

ER -

3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method

Abstract

Keywords

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