3D profile measurement of micro-structured array with light field microscope

Yao Hu; Haibo Gao; Shizhu Yuan; Rui Shi

doi:10.1117/12.2216738

3D profile measurement of micro-structured array with light field microscope

Yao Hu, Haibo Gao, Shizhu Yuan, Rui Shi

School of Optics and Photonics

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

Micro-structured array is a crucial optical element with wide range of applications. The optical performance of microstructured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.

Original language	English
Title of host publication	Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015
Editors	Daren Lv, Lijun Wang, Libin Xiang, Michael I. Petelin, Guangjin Zhang, Songlin Zhuang, Shenggang Liu
Publisher	SPIE
ISBN (Electronic)	9781628418804
DOIs	https://doi.org/10.1117/12.2216738
Publication status	Published - 2015
Event	International Conference on Frontiers in International Conference on Frontiers in Terahertz Technology and Applications, and the International Symposium on Surface Topography and Optical Microscopy - Harbin, China Duration: 23 Jul 2015 → 25 Jul 2015

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9795
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	International Conference on Frontiers in International Conference on Frontiers in Terahertz Technology and Applications, and the International Symposium on Surface Topography and Optical Microscopy
Country/Territory	China
City	Harbin
Period	23/07/15 → 25/07/15

Keywords

Digital focusing
Focus stack
Light field microscope
Microlens array

Access to Document

10.1117/12.2216738

Cite this

Hu, Y., Gao, H., Yuan, S., & Shi, R. (2015). 3D profile measurement of micro-structured array with light field microscope. In D. Lv, L. Wang, L. Xiang, M. I. Petelin, G. Zhang, S. Zhuang, & S. Liu (Eds.), Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015 Article 979523 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9795). SPIE. https://doi.org/10.1117/12.2216738

Hu, Yao ; Gao, Haibo ; Yuan, Shizhu et al. / 3D profile measurement of micro-structured array with light field microscope. Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015. editor / Daren Lv ; Lijun Wang ; Libin Xiang ; Michael I. Petelin ; Guangjin Zhang ; Songlin Zhuang ; Shenggang Liu. SPIE, 2015. (Proceedings of SPIE - The International Society for Optical Engineering).

@inproceedings{536d706810cd4c66b447e3348f51c3a4,

title = "3D profile measurement of micro-structured array with light field microscope",

abstract = "Micro-structured array is a crucial optical element with wide range of applications. The optical performance of microstructured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.",

keywords = "Digital focusing, Focus stack, Light field microscope, Microlens array",

author = "Yao Hu and Haibo Gao and Shizhu Yuan and Rui Shi",

note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; International Conference on Frontiers in International Conference on Frontiers in Terahertz Technology and Applications, and the International Symposium on Surface Topography and Optical Microscopy ; Conference date: 23-07-2015 Through 25-07-2015",

year = "2015",

doi = "10.1117/12.2216738",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Daren Lv and Lijun Wang and Libin Xiang and Petelin, {Michael I.} and Guangjin Zhang and Songlin Zhuang and Shenggang Liu",

booktitle = "Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015",

address = "United States",

}

Hu, Y, Gao, H, Yuan, S & Shi, R 2015, 3D profile measurement of micro-structured array with light field microscope. in D Lv, L Wang, L Xiang, MI Petelin, G Zhang, S Zhuang & S Liu (eds), Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015., 979523, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9795, SPIE, International Conference on Frontiers in International Conference on Frontiers in Terahertz Technology and Applications, and the International Symposium on Surface Topography and Optical Microscopy, Harbin, China, 23/07/15. https://doi.org/10.1117/12.2216738

3D profile measurement of micro-structured array with light field microscope. / Hu, Yao; Gao, Haibo; Yuan, Shizhu et al.
Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015. ed. / Daren Lv; Lijun Wang; Libin Xiang; Michael I. Petelin; Guangjin Zhang; Songlin Zhuang; Shenggang Liu. SPIE, 2015. 979523 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9795).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 3D profile measurement of micro-structured array with light field microscope

AU - Hu, Yao

AU - Gao, Haibo

AU - Yuan, Shizhu

AU - Shi, Rui

PY - 2015

Y1 - 2015

N2 - Micro-structured array is a crucial optical element with wide range of applications. The optical performance of microstructured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.

AB - Micro-structured array is a crucial optical element with wide range of applications. The optical performance of microstructured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.

KW - Digital focusing

KW - Focus stack

KW - Light field microscope

KW - Microlens array

UR - http://www.scopus.com/inward/record.url?scp=84963780279&partnerID=8YFLogxK

U2 - 10.1117/12.2216738

DO - 10.1117/12.2216738

M3 - Conference contribution

AN - SCOPUS:84963780279

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015

A2 - Lv, Daren

A2 - Wang, Lijun

A2 - Xiang, Libin

A2 - Petelin, Michael I.

A2 - Zhang, Guangjin

A2 - Zhuang, Songlin

A2 - Liu, Shenggang

PB - SPIE

T2 - International Conference on Frontiers in International Conference on Frontiers in Terahertz Technology and Applications, and the International Symposium on Surface Topography and Optical Microscopy

Y2 - 23 July 2015 through 25 July 2015

ER -

Hu Y, Gao H, Yuan S, Shi R. 3D profile measurement of micro-structured array with light field microscope. In Lv D, Wang L, Xiang L, Petelin MI, Zhang G, Zhuang S, Liu S, editors, Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015. SPIE. 2015. 979523. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2216738

3D profile measurement of micro-structured array with light field microscope

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this